SU-8 2002 surface micromachined deformable membrane mirrors
SJ Lukes, DL Dickensheets - Journal of …, 2012 - ieeexplore.ieee.org
This paper describes two surface micromachining processes, ie, one using a wet-etch
release and the other using a dry-etch release, to create deformable membrane mirrors …
release and the other using a dry-etch release, to create deformable membrane mirrors …
SU-8 focus control mirrors released by XeF2 dry etch
SJ Lukes, DL Dickensheets - MOEMS and Miniaturized …, 2011 - spiedigitallibrary.org
SU8-2002 deformable membrane mirrors for primary focus control and compensation of
focus-induced spherical aberration have been fabricated using a surface micromachining …
focus-induced spherical aberration have been fabricated using a surface micromachining …
Stress engineering for free-standing SU-8 2002 thin film devices
KW Oliver, SJ Lukes, MJ Moghimi… - Micromachining and …, 2012 - spiedigitallibrary.org
In this paper we describe a process for creating thin SU-8 2002 films between 1.5 μm and
3.0 μm thick that are hardbaked and can withstand a release etch in either aqueous or …
3.0 μm thick that are hardbaked and can withstand a release etch in either aqueous or …
MEMS Varifocal Mirror for High-Power Laser Focusing
AA Geraldes - 2019 - iris.univr.it
Today, lasers are used in many surgical procedures due to their ability of performing precise
incisions, and ablations. With the development of fiber-coupled lasers, even minimally …
incisions, and ablations. With the development of fiber-coupled lasers, even minimally …