Atomic layer deposition of metal oxides and chalcogenides for high performance transistors

C Shen, Z Yin, F Collins, N Pinna - Advanced Science, 2022 - Wiley Online Library
Atomic layer deposition (ALD) is a deposition technique well‐suited to produce high‐quality
thin film materials at the nanoscale for applications in transistors. This review …

Amorphous oxide semiconductors: From fundamental properties to practical applications

B Lu, F Zhuge, Y Zhao, YJ Zeng, L Zhang… - Current Opinion in Solid …, 2023 - Elsevier
Amorphous oxide semiconductors (AOSs) have exceptional features of high visible
transparency, high carrier mobility, excellent uniformity, and low-temperature growth …

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Tin(IV) Oxide from a Functionalized Alkyl Precursor: Fabrication and Evaluation of SnO2-Based Thin …

L Mai, D Zanders, E Subaşı, E Ciftyurek… - … applied materials & …, 2019 - ACS Publications
A bottom-up process from precursor development for tin to plasma-enhanced atomic layer
deposition (PEALD) for tin (IV) oxide and its successful implementation in a working thin-film …

Solution processed low band gap ion-conducting gate dielectric for low voltage metal oxide transistor

NK Chourasia, A Sharma, V Acharya, N Pal… - Journal of Alloys and …, 2019 - Elsevier
Low band gap ion conducting Li 2 ZnO 2 thin film has been synthesized by low cost solution
processed technique and has been employed to fabricate low operating voltage metal oxide …

Centimeter-Scale Nanoporous 2D Membranes and Ion Transport: Porous MoS2 Monolayers in a Few-Layer Matrix

P Masih Das, JP Thiruraman, YC Chou, G Danda… - Nano Letters, 2018 - ACS Publications
Two-dimensional nanoporous membranes have received attention as catalysts for energy
generation and membranes for liquid and gas purification but controlling their porosity and …

Characterization studies of the structure and properties of Zr-doped SnO2 thin films by spin-coating technique

X Zhang, X Liu, H Ning, W Yuan, Y Deng… - Superlattices and …, 2018 - Elsevier
Transparent electrodes made of transparent conductive oxides materials are widely used in
optoelectronic devices. The zirconium doped tin oxide films as transparent conductive …

[HTML][HTML] Effect of Intrinsic Stress on Structural and Optical Properties of Amorphous Si-Doped SnO2 Thin-Film

H Ning, X Liu, H Zhang, Z Fang, W Cai, J Chen, R Yao… - Materials, 2017 - mdpi.com
The effect of intrinsic stress on the structure and physical properties of silicon-tin-oxide (STO)
films have been investigated. Since a state of tensile stress is available in as-deposited …

Dual Role of AgNO3 as an Oxidizer and Chloride Remover toward Enhanced Combustion Synthesis of Low-Voltage and Low-Temperature Amorphous Rare Metal …

CGP Quino, JP Bermundo, H Kawanishi… - ACS Applied …, 2024 - ACS Publications
SnO2 transistors show great promise as an alternative to existing In2O3-based transistors,
considering their abundance and similar electronic properties. However, they suffer from …

A novel nondestructive testing method for amorphous Si–Sn–O films

X Liu, W Cai, J Chen, Z Fang, H Ning… - Journal of Physics D …, 2016 - iopscience.iop.org
Traditional methods to evaluate the quality of amorphous silicon-substituted tin oxide (a-
STO) semiconductor film are destructive and time-consuming. Here, a novel non-destructive …

[HTML][HTML] Solution-Processed Silicon Doped Tin Oxide Thin Films and Thin-Film Transistors Based on Tetraethyl Orthosilicate

Z He, X Zhang, X Wei, D Luo, H Ning, Q Ye, R Wu… - Membranes, 2022 - mdpi.com
Recently, tin oxide (SnO2) has been the preferred thin film material for semiconductor
devices such as thin-film transistors (TFTs) due to its low cost, non-toxicity, and superior …