Microelectromechanical systems (MEMS) thermal-piezoresistive resonator (TPRs) and
thermal-piezoresistive oscillator (TPO) use thermal actuation and realize feedback through …

This work reports highly selective multiple analyte detection by exploiting two different
mechanisms; absorption and thermal conductivity using a single MEMS device. To illustrate …

In this study, we investigate the performance of two piezoresistive micro-electro-mechanical
system (MEMS)-based silicon cantilever sensors for measuring target analytes (ie, ultrafine …

An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance
sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of …

Electrothermal piezoresistive resonant cantilever sensors have been fabricated with
embedded actuating (heating resistor) and sensing (piezo resistors) parts, with the latter …

To realize the real-time measurement of masses of nanoparticles, virus molecules, organic
macromolecules, and gas molecules, and to analyze their physical and chemical properties …

Liquid-borne particles sampling and cantilever-based mass detection are widely applied in
many industrial and scientific fields eg, in the detection of physical, chemical, and biological …

The existence of shunt capacitance in Quartz Crystal Microbalance (QCM) structure leads
appearance of anti-resonance in the spectral response. The anti-resonance leads to higher …

In this work, we demonstrate a selective gas sensor based on monitoring two different
detection mechanisms; absorption and thermal conductivity. To illustrate the concept, we …

This paper reports a real-time liquid-phase quantitative analysis system, where in-plane
flexural piezoresistive Si cantilever resonators are utilized as microsensors. The new …