In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted
attention as next-generation functional microdevices. Typical applications of piezoelectric …

We evaluated the effective transverse piezoelectric coefficients (e 31, f) of Pb (Zr, Ti) O 3
(PZT) thin films from both the direct and converse piezoelectric effects of unimorph …

We report on the correlated investigation between macroscopic piezoelectric properties and
the microscopic deformation of crystal structures of both epitaxial and polycrystalline Pb (Zr …

In this study, we investigated the piezoelectric characteristics of the sol-gel Pb (Zr 0.52 Ti
0.48) O 3 (PZT) films deposited on two different types of substrates. Epitaxial PZT …

To realize transparent piezoelectric microdevices, Pb (Zr, Ti) O 3 (PZT) thin films are
deposited on fluorine-doped tin oxide (FTO)-coated glass substrates, and the resultant …

In this study, Piezoelectric energy harvesters (PEHs) are fabricated based on epitaxial Pb
(Zr, Ti) O3 (PZT) thin films deposited by an RF magnetron sputtering with varied Zr/[Zr+ Ti] …

In this study, we propose a new piezoelectric measurement method using unimorph
microcantilevers to evaluate precise values of direct and converse piezoelectric coefficients …

We fabricated piezoelectric vibration energy harvesters of c-axis-oriented epitaxial Pb (Zr, Ti)
O3 (PZT) thin films on stainless steel (SS304) cantilevers in an effort to improve their power …

Piezoelectric thin films have attracted attention as key materials of next generation functional
micro-devices. Application products of piezoelectric thin films have been launched such as …

For a comprehensive study of the growth mechanisms of Pb (Zr, Ti) O 3 (PZT), we employed
a combinatorial sputtering method that enabled us to fabricate films with composition and …