BC Bussell, PN Gibson, J Lawton,
P Couture… - Surface and Coatings …, 2022 - Elsevier
Aluminium-doped ZnO (AZO) thin films were deposited by remote plasma sputtering of a
ZnO: Al 2 O 3 98: 2 wt% ceramic target in a pulsed DC configuration. The target power was …