Progress, challenges, and opportunities in oxide semiconductor devices: a key building block for applications ranging from display backplanes to 3D integrated …
As Si has faced physical limits on further scaling down, novel semiconducting materials such
as 2D transition metal dichalcogenides and oxide semiconductors (OSs) have gained …
as 2D transition metal dichalcogenides and oxide semiconductors (OSs) have gained …
[HTML][HTML] Recent advances of In2O3-based thin-film transistors: A review
The electronics industry has witnessed a surge in demand for semiconductor materials,
prompting researchers to explore active semiconductors that can effectively meet the …
prompting researchers to explore active semiconductors that can effectively meet the …
Thermally activated defect engineering for highly stable and uniform ALD-amorphous IGZO TFTs with high-temperature compatibility
DG Kim, WB Lee, S Lee, J Koh, B Kuh… - ACS Applied Materials …, 2023 - ACS Publications
Highly stable IGZO thin-film transistors derived from atomic layer deposition are crucial for
the semiconductor industry. However, unavoidable defect generation during high …
the semiconductor industry. However, unavoidable defect generation during high …
Near-ideal top-gate controllability of InGaZnO thin-film transistors by suppressing interface defects with an ultrathin atomic layer deposited gate insulator
An ultrathin atomic-layer-deposited (ALD) AlO x gate insulator (GI) was implemented for self-
aligned top-gate (SATG) amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs). Although …
aligned top-gate (SATG) amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs). Although …
Selectively nitrogen doped ALD-IGZO TFTs with extremely high mobility and reliability
DG Kim, H Choi, YS Kim, DH Lee, HJ Oh… - … Applied Materials & …, 2023 - ACS Publications
Achieving high mobility and reliability in atomic layer deposition (ALD)-based IGZO thin-film
transistors (TFTs) with an amorphous phase is vital for practical applications in relevant …
transistors (TFTs) with an amorphous phase is vital for practical applications in relevant …
Comparative Study on Indium Precursors for Plasma-Enhanced Atomic Layer Deposition of In2O3 and Application to High-Performance Field-Effect Transistors
Indium oxide (In2O3) is a transparent wide-bandgap semiconductor suitable for use in the
back-end-of-line-compatible channel layers of heterogeneous monolithic three-dimensional …
back-end-of-line-compatible channel layers of heterogeneous monolithic three-dimensional …
Subgap states in aluminium-and hydrogen-doped zinc-oxide thin-film transistors
M Yoon, D Hyun, HS Kim - Journal of Materials Chemistry C, 2023 - pubs.rsc.org
This study presents the Al2O3-induced hydrogen and aluminium doping effects on the
electronic structures of atomic-layer-deposited ZnO films via low-temperature measurements …
electronic structures of atomic-layer-deposited ZnO films via low-temperature measurements …
High-Performance Self-Aligned Top-Gate Amorphous InGaZnO TFTs With 4 nm-Thick Atomic-Layer-Deposited AlOx Insulator
Electrical characteristics of self-aligned top-gate (SATG) amorphous InGaZnO (a-IGZO) thin-
film transistors (TFTs) with 4 nm-thick atomic-layer-deposited (ALD) AlO x gate insulator (GI) …
film transistors (TFTs) with 4 nm-thick atomic-layer-deposited (ALD) AlO x gate insulator (GI) …
High-performance a-ITZO TFTs with high bias stability enabled by self-aligned passivation using a-GaOx
Maintaining gate bias stability under negative bias stress (NBS) and positive bias stress
(PBS) is a long-standing issue in amorphous oxide semiconductor thin-film transistors …
(PBS) is a long-standing issue in amorphous oxide semiconductor thin-film transistors …
Recent progress and perspectives of field‐effect transistors based on p‐type oxide semiconductors
Oxide semiconductors are considered as one of the most promising candidates for back‐
end‐of‐line transistors for monolithic 3D integration due to various advantages, such as …
end‐of‐line transistors for monolithic 3D integration due to various advantages, such as …