Fabrication and characterization of low defect density GaN using facet-controlled epitaxial lateral overgrowth (FACELO)

K Hiramatsu, K Nishiyama, M Onishi, H Mizutani… - Journal of Crystal …, 2000 - Elsevier
Facet structures of GaN grown by epitaxial lateral overgrowth (ELO) via low-pressure
metalorganic vapor-phase epitaxy (LP-MOVPE) are controlled by growth conditions such as …

Technique for the growth and fabrication of semipolar (Ga, A1, In, B) N thin films, heterostructures, and devices

RM Farrell Jr, TJ Baker, A Chakraborty… - US Patent …, 2010 - Google Patents
6,599,362 B2 7/2003 Ashby et al. 6,847,057 B1 1/2005 Gardner et al. 7,091,514 B2 8, 2006
Craven et al. 7,186.302 B2 3/2007 Chakraborty et al. 7,575,947 B2 8, 2009 Iza et al …

Preparation of large freestanding GaN substrates by hydride vapor phase epitaxy using GaAs as a starting substrate

KMK Motoki, TOT Okahisa… - Japanese Journal of …, 2001 - iopscience.iop.org
A freestanding GaN substrate over 2 inches in size was successfully prepared for the first
time by hydride vapor phase epitaxy (HVPE) using GaAs as a starting substrate. In the …

Epitaxial lateral overgrowth of GaN

B Beaumont, P Vennéguès, P Gibart - physica status solidi (b), 2001 - Wiley Online Library
Since there is no GaN bulk single crystal available, the whole technological development of
GaN based devices relies on heteroepitaxy. Numerous defects are generated in the …

GaN substrates for III-nitride devices

T Paskova, DA Hanser, KR Evans - Proceedings of the IEEE, 2009 - ieeexplore.ieee.org
Despite the rapid commercialization of III-nitride semiconductor devices for applications in
visible and ultraviolet optoelectronics and in high-power and high-frequency electronics …

Growth and characterization of freestanding GaN substrates

K Motoki, T Okahisa, S Nakahata, N Matsumoto… - Journal of Crystal …, 2002 - Elsevier
A freestanding GaN substrate of over 2inch size with low dislocation density was prepared
by hydride vapor phase epitaxy (HVPE) using GaAs (111) A as a starting substrate. An SiO2 …

Epitaxial lateral overgrowth techniques used in group III nitride epitaxy

K Hiramatsu - Journal of Physics: Condensed Matter, 2001 - iopscience.iop.org
Selective-area growth (SAG) and epitaxial lateral overgrowth (ELO) techniques used in
group III nitride epitaxy are reviewed. Structurally controlled GaN in line patterns and dot …

GaN substrates—Progress, status, and prospects

T Paskova, KR Evans - IEEE Journal of Selected Topics in …, 2009 - ieeexplore.ieee.org
Recent advances in the research, development, and commercial production of native GaN
substrates with low defect density and high structural and optical quality have attracted a …

Air-bridged lateral epitaxial overgrowth of GaN thin films

I Kidoguchi, A Ishibashi, G Sugahara, Y Ban - Applied Physics Letters, 2000 - pubs.aip.org
A promising technique of selective lateral epitaxy, namely air-bridged lateral epitaxial
overgrowth, is demonstrated in order to reduce the wing tilt as well as the threading …

GaN substrate and GaN homo-epitaxy for LEDs: Progress and challenges

JJ Wu, K Wang, TJ Yu, GY Zhang - Chinese Physics B, 2015 - iopscience.iop.org
After a brief review on the progresses in GaN substrates by ammonothermal method and Na-
flux method and hydride vapor phase epitaxy (HVPE) technology, our research results of …