In this work, we present an experimental technique to detect the onset of bifurcation and
measure the extent of hysteresis in electrostatic MEMS. The device-under-test comprises a …

In this paper, we compare two measurement techniques to analyze the dynamic response of
a MEMS resonator, made of a microcantilever beam, that is electrostatically actuated via a …

An alternative packaging method, termed built-in packaging, is proposed for single terminal
devices, and demonstrated with an actuator application. Built-in packaging removes the …

This paper investigates the implementation of 1: 2 internal resonance (InRes) in a clamped–
clamped stepped beam resonator with a strong Duffing effect, focusing on its potential for …

The measurement of in-plane motion in microelectromechanical systems (MEMS) is a
challenge for existing measurement techniques due to the small size of the moving devices …

We developed a new technique for the detection of shear horizontal surface acoustic waves
(SH-SAW) using a one-dimensional laser-based Doppler vibrometer. It measures the out-of …

The nonlinear dynamics of Micro-Electro-Mechanical Systems (MEMS) feature interesting
phenomena that can be employed to improve the performance of MEMS actuators and …

This thesis presents a novel electric permittivity sensor based on Bleustein-Gulyaev (BG)
waves; waves that propagate along the surface of shear-poled piezoelectric materials. BG …

This study reports on an experimental investigation of modal interactions in a
microresonator. The resonator is made of a clamped-clamped curved beam, electrostatically …