C Chui, M Kothari, M Mignard, MC Mathew… - US Patent …, 2011 - Google Patents
Embodiments of exemplary MEMS interferometric modula tors are arranged at intersections of rows and columns of electrodes. In certain embodiments, the column electrode has a …
X Zhu, M Brobston - US Patent 7,332,980, 2008 - Google Patents
BACKGROUND Impedance matching is used to match the impedance of a Source with the impedance of a load circuit. As is known, matching the impedance of the Source and load …
M Brobston - US Patent App. 11/957,606, 2008 - Google Patents
The present disclosure relates to a power amplifier circuit. In one example, the power amplifier circuit includes a power amplifier coupled to a variable load and a digitally tunable …
GA Dunbar III, JC Maling, WJ Murphy… - US Patent …, 2015 - Google Patents
(57) ABSTRACT A Micro-Electro-Mechanical System (MEMS). The MEMS includes a lower chamber with a wiring layer and an upper chamber which is connected to the lower …
FX Musalem, AS Morris III, JR Gilbert… - US Patent …, 2007 - Google Patents
US7180145B2 - Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods - Google Patents US7180145B2 - Micro-electro-mechanical …
RT Herrin, CV Jahnes, AK Stamper, EJ White - US Patent 8,956,903, 2015 - Google Patents
A method of forming at least one Micro-Electro-Mechanical System (MEMS) cavity includes forming a first sacrificial cavity layer over a wiring layer and substrate. The method further …
CV Jahnes, AK Stamper - US Patent 8,685,778, 2014 - Google Patents
(57) ABSTRACT A method of forming at least one Micro-Electro-Mechanical System (MEMS) cavity includes forming a first sacrificial cavity layer over a lower wiring layer. The method …
CV Jahnes, AK Stamper - US Patent 8,709,264, 2014 - Google Patents
(57) ABSTRACT A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insu lator layer within a cavity of the MEMS. The method …