System and method for a tunable impedance matching network

M Brobston, X Zhu, SE Kim - US Patent 7,671,693, 2010 - Google Patents
BACKGROUND Impedance matching is used to match the impedance of a Source with the
impedance of a load circuit. As is known, matching the impedance of the Source and load …

Drive method for MEMS devices

C Chui, M Kothari, M Mignard, MC Mathew… - US Patent …, 2011 - Google Patents
Embodiments of exemplary MEMS interferometric modula tors are arranged at intersections
of rows and columns of electrodes. In certain embodiments, the column electrode has a …

System and method for a digitally tunable impedance matching network

X Zhu, M Brobston - US Patent 7,332,980, 2008 - Google Patents
BACKGROUND Impedance matching is used to match the impedance of a Source with the
impedance of a load circuit. As is known, matching the impedance of the Source and load …

Method of manufacturing a micro-electro-mechanical system (MEMS)

AK Stamper, JG Twombly - US Patent 8,458,888, 2013 - Google Patents
6,897,537 6,917,086 7,008,812 7,019,434 7,064,637 7,138,745 7,180,145 7,294.282
7,299,538 7,344,907 7,361,962 7.388, 316 7,394,332 7,402,449 7,545,622 7,579,663 …

Power amplifier matching circuit and method using tunable mems devices

M Brobston - US Patent App. 11/957,606, 2008 - Google Patents
The present disclosure relates to a power amplifier circuit. In one example, the power
amplifier circuit includes a power amplifier coupled to a variable load and a digitally tunable …

Planar cavity MEMS and related structures, methods of manufacture and design structures

GA Dunbar III, JC Maling, WJ Murphy… - US Patent …, 2015 - Google Patents
(57) ABSTRACT A Micro-Electro-Mechanical System (MEMS). The MEMS includes a lower
chamber with a wiring layer and an upper chamber which is connected to the lower …

Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods

FX Musalem, AS Morris III, JR Gilbert… - US Patent …, 2007 - Google Patents
US7180145B2 - Micro-electro-mechanical system (MEMS) variable capacitor apparatuses,
systems and related methods - Google Patents US7180145B2 - Micro-electro-mechanical …

Planar cavity MEMS and related structures, methods of manufacture and design structures

RT Herrin, CV Jahnes, AK Stamper, EJ White - US Patent 8,956,903, 2015 - Google Patents
A method of forming at least one Micro-Electro-Mechanical System (MEMS) cavity includes
forming a first sacrificial cavity layer over a wiring layer and substrate. The method further …

Planar cavity MEMS and related structures, methods of manufacture and design structures

CV Jahnes, AK Stamper - US Patent 8,685,778, 2014 - Google Patents
(57) ABSTRACT A method of forming at least one Micro-Electro-Mechanical System (MEMS)
cavity includes forming a first sacrificial cavity layer over a lower wiring layer. The method …

Planar cavity MEMS and related structures, methods of manufacture and design structures

CV Jahnes, AK Stamper - US Patent 8,709,264, 2014 - Google Patents
(57) ABSTRACT A method of forming a Micro-Electro-Mechanical System (MEMS) includes
forming a lower electrode on a first insu lator layer within a cavity of the MEMS. The method …