Chemical mechanical polishing for hybrid bonding

GG Fountain Jr, C Mandalapu, CE Uzoh… - US Patent …, 2020 - Google Patents
Methods for hybrid bonding include depositing and patterning a dielectric layer on a
substrate to form openings in the dielectric layer, depositing a barrier layer over the dielectric …

Bonded structures with integrated passive component

B Haba, I Mohammed, R Katkar, GZ Guevara… - US Patent …, 2023 - Google Patents
2018-02-20 Assigned to INVENSAS BONDING TECHNOLOGIES, INC. reassignment
INVENSAS BONDING TECHNOLOGIES, INC. ASSIGNMENT OF ASSIGNORS INTEREST …

Large metal pads over TSV

G Gao, LEE Bongsub, GG Fountain Jr… - US Patent …, 2022 - Google Patents
Representative techniques and devices including process steps may be employed to
mitigate the potential for delamination of bonded microelectronic substrates due to metal …

Interconnect structures and methods for forming same

CE Uzoh, LW Mirkarimi - US Patent 11,195,748, 2021 - Google Patents
US11195748B2 - Interconnect structures and methods for forming same - Google Patents
US11195748B2 - Interconnect structures and methods for forming same - Google Patents …

Interface structures and methods for forming same

S Huang, B Haba, JA Delacruz - US Patent 10,784,191, 2020 - Google Patents
A stacked and electrically interconnected structure is disclosed. The structure can comprise
a first element and a second element directly bonded to the first element along a bonding …

Cavity packages

S Huang, JA Delacruz, L Wang, R Katkar… - US Patent …, 2021 - Google Patents
An integrated device package is disclosed. The integrated device package can include an
integrated device die, an element, a cavity, and an electrical interconnect. The ele ment can …

Microelectronic assemblies

B Haba - US Patent 11,462,419, 2022 - Google Patents
Various embodiments of fanout packages are disclosed. A method of forming a
microelectronic assembly is disclosed. The method can include bonding a first surface of at …

Bonded structures

R Katkar, LW Mirkarimi, LEE Bongsub… - US Patent …, 2021 - Google Patents
A bonded structure is disclosed. The bonded structure includes a first element and a second
element that is bonded to the first element along a bonding interface. The bonding interface …

Interconnect structures

CE Uzoh, GG Fountain Jr, JA Theil - US Patent 11,158,573, 2021 - Google Patents
Representative techniques and devices, including process steps may be employed to
mitigate undesired dishing in conductive interconnect structures and erosion of dielectric …

Bonded structures

R Katkar, L Wang - US Patent 11,380,597, 2022 - Google Patents
A bonded structure is disclosed. The bonded structure can include a first element that has a
first bonding surface. The bonded structure can further include a second element that has a …