Polyimides are widely used in the MEMS and flexible electronics fields due to their
combined physicochemical properties, including high thermal stability, mechanical strength …

This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …

Tilt sensors have been widely used in many applications, such as instrumentation leveling,
oil drilling and structural health monitoring. With the rapid development of the micro …

High-precision microelectromechanical inertial sensors based on spring-mass structures are
of great interests for a wide range of applications, including inertial navigation, disaster …

High-precision seismic sensors are key components in geophysical applications. Traditional
seismic sensors apply levelling systems to avoid overload by the gravity projection …

This manuscript presents the development of an integrated analog interface able to convert
differential capacitive sensors variations into a DC voltage. The presented circuit exploits the …

Nano-g accelerometers are widely used in space exploration and measurement of the
earth's gravitational field. It is essential to precisely evaluate error effects at high orders such …

Capacitive micro accelerometers with high sensitivity have found wide applications in
geophysics. Reducing the interelectrode spacing, which is determined by the thickness …

Low-noise capacitive sensor is widely used in electrostatic accelerometers and inertial
sensors. An AC excitation signal is necessary to realize the amplitude modulation of the …

Capacitive displacement transducers (CDTs) have been widely used in many physical
sensors, attributing to high-resolution, simple electricity and easy manufacturing process …