A snapshot review on metal–semiconductor contact exploration for 7-nm CMOS technology and beyond

H Yu, M Schaekers, JL Everaert, N Horiguchi… - MRS Advances, 2022 - Springer
Contact resistances take a significant portion of on-state resistances of advanced Si CMOS
transistors. As a result, a metal–semiconductor contact resistivity (ρ c) of sub-10–8 Ω cm2 or …

Evaluation of the chemical states and electrical activation of ultra-highly B-doped Si1-xGex by ion implantation and subsequent nanosecond laser annealing

K Lee, C Jo, D Yoon, S Baik, DH Ko - Applied Surface Science, 2024 - Elsevier
Given that transistor dimensions are approaching atomic scale in metal–oxide–
semiconductor field-effect-transistors (MOSFETs), attaining low-contact resistivity (ρ c) …

Reduction of phosphorus diffusion in bulk germanium via argon/phosphorus co-implantation and RTA annealing

AB Goldstone, NK Dhar, V Avrutin, O Vail… - Journal of Applied …, 2023 - pubs.aip.org
Germanium has received increased research interest for use in next-generation CMOS
technology as its high carrier mobilities allow for enhanced device performance without …

Atomistic Mechanisms for the Thermal Relaxation of -hyperdoped

W Yang, Q Hudspeth, PK Chow, JM Warrender… - Physical Review …, 2019 - APS
Au-hyperdoped Si produced by ion implantation and pulsed laser melting exhibits sub-band-
gap absorption in the near infrared, a property that is interesting for Si photonics. However …

Characterization and modeling of thermally-induced doping contaminants in high-purity germanium

V Boldrini, G Maggioni, S Carturan… - Journal of Physics D …, 2018 - iopscience.iop.org
High purity germanium (HPGe) is the key material for gamma ray detectors production. Its
high purity level (⩽ 2· 10− 4 ppb of doping impurity) has to be preserved in the bulk during …

Segregation and activation of Sb implanted in Si by UV nanosecond-laser-anneal-induced non-equilibrium solidification

T Tabata, PE Raynal, K Huet, JL Everaert - Journal of Applied Physics, 2020 - pubs.aip.org
In advanced logic devices, access resistance to transistors is dominated by metal–
semiconductor contact resistivity. Recent studies report values below 1× 10− 9 ohm cm 2 …

Evolution of phosphorus-vacancy clusters in epitaxial germanium

A Vohra, A Khanam, J Slotte, I Makkonen… - Journal of Applied …, 2019 - pubs.aip.org
The E centers (dopant-vacancy pairs) play a significant role in dopant deactivation in
semiconductors. In order to gain insight into dopant-defect interactions during epitaxial …

Ex situ n+ doping of GeSn alloys via non-equilibrium processing

S Prucnal, Y Berencén, M Wang… - Semiconductor …, 2018 - iopscience.iop.org
Full integration of Ge-based alloys like GeSn with complementary-metal-oxide-
semiconductor technology would require the fabrication of p-and n-type doped regions for …

Dissolution of donor-vacancy clusters in heavily doped n-type germanium

S Prucnal, MO Liedke, X Wang, M Butterling… - New Journal of …, 2020 - iopscience.iop.org
The n-type doping of Ge is a self-limiting process due to the formation of vacancy-donor
complexes (D n V with n⩽ 4) that deactivate the donors. This work unambiguously …

Pulsed laser diffusion of thin hole-barrier contacts in high purity germanium for gamma radiation detectors

G Maggioni, S Carturan, W Raniero, S Riccetto… - The European Physical …, 2018 - Springer
A new method for the formation of hole-barrier contacts in high purity germanium (HPGe) is
described, which consists in the sputter deposition of a Sb film on HPGe, followed by Sb …