Computational lithography provides algorithmic and mathematical support for resolution enhancement in optical lithography, which is the critical step in semiconductor …
Inverse lithography technique (ILT) is one of the most widely used resolution enhancement techniques (RETs) to compensate for the diffraction effect in the lithography process …
H Geng, H Yang, L Zhang, J Miao, F Yang… - Proceedings of the 39th …, 2020 - dl.acm.org
With the aggressive and amazing scaling of the feature size of semiconductors, hotspot detection has become a crucial and challenging problem in the generation of optimized …
Optical proximity correction (OPC) is a widely-used resolution enhancement technique (RET) for printability optimization. Recently, rigorous numerical optimization and fast …
Within the Electronic Design Automation (EDA) domain, AI-driven solutions have emerged as formidable tools, yet they typically augment rather than redefine existing methodologies …
S Sun, F Yang, B Yu, L Shang… - 2023 60th ACM/IEEE …, 2023 - ieeexplore.ieee.org
Inverse Lithography Technology (ILT) is a widely investigated method to improve the yield of chip manufacturing. However, high computational complexity and difficulty in fabricating …
Inverse lithography technology (ILT) is one of the promising resolution enhancement techniques (RETs) in modern design-for-manufacturing closure, however, it suffers from …
Analog circuit design is a significant task in modern chip technology, focusing on the selection of component types, connectivity, and parameters to ensure proper circuit …
Source mask optimization (SMO) is vital for mitigating lithography imaging distortions caused by shrinking critical dimensions in integrated circuit fabrication. However, the …