This paper presents a short review of the microwave acoustics area, where exciting material
innovations and performance advancements have been made in the past decade. The ever …

Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

Metamaterial systems have opened new, unexpected, and exciting paths for the design of
acoustic devices that only few years ago were considered completely out of reach. However …

In this paper, we analyze possible sources of dissipation in aluminium nitride (AlN) contour
mode resonators for three different resonance frequency devices (fr)(220 MHz, 370 MHz …

In engineering acoustics, the propagation of elastic flexural waves in plate and shell
structures is a common transmission path of vibrations and structure-borne noises. Phononic …

Monolithic integration of Microelectromechanical Systems (MEMS) directly within CMOS
technology offers enhanced functionality for integrated circuits (IC) and the potential …

The explosive development of wireless and mobile communication systems has
continuously driven rapid technology innovation in component performance and system …

Over the last two decades, piezoelectric resonant sensors based on micro-
electromechanical systems (MEMS) technologies have been extensively studied as such …

Resonant mechanical sensors are often considered as mass balance, which responds to an
analyte adsorbed on or absorbed in a thin sensitive (and selective) layer deposited on the …