Silicon, as a single-crystal semiconductor, has brought about a great revolution in the field of electronics and has touched almost all fields of science and technology. Though available …
H Tsuya - Japanese journal of applied physics, 2004 - iopscience.iop.org
Si wafers have contributed to the rapid growth of the semiconductor industry as a basic material for ultra large scale integration (ULSI) through the research and development of …
The initiation and propagation of a crack in a silicon wafer introduces local variations in the stress field and lattice structure through elastic energy release at crack-tip. In this study, the …
BC Trzynadlowski, ST Dunham - Journal of Applied Physics, 2013 - pubs.aip.org
A model for the precipitation of oxygen and associated dislocation loops in Czochralski- grown silicon is presented. Beginning with kinetic rate equations describing the growth and …
Nanoindentation was used to measure the mechanical properties of 200mm diameter (100) CZ Si wafers subjected to the initiation and propagation of micro-crack defects. Silicon …
We report on crack propagation in 200 mm diameter Czochralski (CZ) grown silicon wafers produced for photovoltaic (PV) applications at elevated growth rates. Enhanced thermal …
B Gao, M Juel, M Mhamdi - Journal of Crystal Growth, 2016 - Elsevier
To illuminate the role of crystal growth process on final oxygen precipitates during heat treatment of Cz-Si wafer, a coupled model, including the interaction of oxygen precipitates …
B Trzynadlowski - 2013 - digital.lib.washington.edu
The demand for ever smaller, higher-performance integrated circuits and more efficient, cost- effective solar cells continues to push the frontiers of process technology. Fabrication of …
The plastic deformation and microstructural changes in mono-crystalline silicon under various conditions have been the research focus over decades, including hydrostatic …