Nanoimprint technology for patterning functional materials and its applications

CC Yu, HL Chen - Microelectronic Engineering, 2015 - Elsevier
Functional materials including metals, ceramics, plastics, and nanomaterials are now widely
adopted in modern devices. To facilitate the fabrication of nanostructured functional …

An assessment of the process capabilities of nanoimprint lithography

T Balla, SM Spearing, A Monk - Journal of Physics D: Applied …, 2008 - iopscience.iop.org
Nanoimprint lithography (NIL) is an emerging nanofabrication tool, able to replicate imprint
patterns quickly and at high volumes. The present study was performed in order to define the …

UV-curable nanoimprint resin with enhanced anti-sticking property

JY Kim, DG Choi, JH Jeong, ES Lee - Applied surface science, 2008 - Elsevier
This paper reports on a newly developed anti-sticking resin obtained by mixing a fluorine-
containing monomer (F-monomer) for UV nanoimprinting lithography (UV-NIL) to reduce the …

Characterisation of nano-interdigitated electrodes

LHD Skjolding, C Spegel, A Ribayrol… - Journal of Physics …, 2008 - iopscience.iop.org
Interdigitated electrodes made up of two individually addressable interdigitated comb-like
electrode structures have frequently been suggested as ultra sensitive electrochemical …

Nanoimprint lithography (NIL) and related techniques for electronics applications

I Tiginyanu, V Ursaki, V Popa - Nanocoatings and Ultra-Thin Films, 2011 - Elsevier
This chapter provides a review of nanoimprint lithography techniques, highlighting their
potential to surpass photolithography in resolution, and, at the same time, to allow mass …

Fabrication of micro-and submicrometer silver patterns by microcontact printing of mercaptosilanes and direct electroless metallization

G Mondin, B Schumm, J Fritsch, J Grothe… - Microelectronic …, 2013 - Elsevier
A novel method for the fabrication of silver micro-and submicrometer patterns on glass
substrates is reported. Microcontact printing is used to selectively print 3 …

Fabrication of low-cost submicron patterned polymeric replica mold with high elastic modulus over a large area

JY Kim, KS Park, ZS Kim, KH Baek, LM Do - Soft Matter, 2012 - pubs.rsc.org
Low cost submicron patterning technique to fabricate a large area polymeric replica mold
using an ultraviolet nanoimprint lithography (UV-NIL) technique is reported. A photo-curable …

Large area nanosize array stamp for UV-based nanoimprint lithography fabricated by size reduction process

X Li, Q Wang, J Zhang, W Zhou, Y Liu, Y Wan… - Microelectronic …, 2009 - Elsevier
A novel size reduction process using electron beam lithography (EBL) combining with wet
etching technique is developed as a possible solution for producing large area and low cost …

Large-scale fabrication of nanopatterned sapphire substrates by annealing of patterned Al thin films by soft UV-nanoimprint lithography

L Cui, JC Han, GG Wang, HY Zhang, R Sun… - Nanoscale Research …, 2013 - Springer
Large-scale nanopatterned sapphire substrates were fabricated by annealing of patterned
Al thin films. Patterned Al thin films were obtained by soft UV-nanoimprint lithography and …

Step-edge like template fabrication of polyelectrolyte supported nickel nanowires

D Srivastava, TR Hendricks, I Lee - Nanotechnology, 2007 - iopscience.iop.org
A method to produce novel polymer supported nickel nanowires, which are asymmetric (or
anisotropic) in shape and function, using an alumina membrane as a template is presented …