T Balla, SM Spearing, A Monk - Journal of Physics D: Applied …, 2008 - iopscience.iop.org
Nanoimprint lithography (NIL) is an emerging nanofabrication tool, able to replicate imprint patterns quickly and at high volumes. The present study was performed in order to define the …
JY Kim, DG Choi, JH Jeong, ES Lee - Applied surface science, 2008 - Elsevier
This paper reports on a newly developed anti-sticking resin obtained by mixing a fluorine- containing monomer (F-monomer) for UV nanoimprinting lithography (UV-NIL) to reduce the …
LHD Skjolding, C Spegel, A Ribayrol… - Journal of Physics …, 2008 - iopscience.iop.org
Interdigitated electrodes made up of two individually addressable interdigitated comb-like electrode structures have frequently been suggested as ultra sensitive electrochemical …
This chapter provides a review of nanoimprint lithography techniques, highlighting their potential to surpass photolithography in resolution, and, at the same time, to allow mass …
G Mondin, B Schumm, J Fritsch, J Grothe… - Microelectronic …, 2013 - Elsevier
A novel method for the fabrication of silver micro-and submicrometer patterns on glass substrates is reported. Microcontact printing is used to selectively print 3 …
JY Kim, KS Park, ZS Kim, KH Baek, LM Do - Soft Matter, 2012 - pubs.rsc.org
Low cost submicron patterning technique to fabricate a large area polymeric replica mold using an ultraviolet nanoimprint lithography (UV-NIL) technique is reported. A photo-curable …
X Li, Q Wang, J Zhang, W Zhou, Y Liu, Y Wan… - Microelectronic …, 2009 - Elsevier
A novel size reduction process using electron beam lithography (EBL) combining with wet etching technique is developed as a possible solution for producing large area and low cost …
L Cui, JC Han, GG Wang, HY Zhang, R Sun… - Nanoscale Research …, 2013 - Springer
Large-scale nanopatterned sapphire substrates were fabricated by annealing of patterned Al thin films. Patterned Al thin films were obtained by soft UV-nanoimprint lithography and …
D Srivastava, TR Hendricks, I Lee - Nanotechnology, 2007 - iopscience.iop.org
A method to produce novel polymer supported nickel nanowires, which are asymmetric (or anisotropic) in shape and function, using an alumina membrane as a template is presented …