Methods and apparatus for utilizing an optical reference

JS Ehrmann, PS Duffy, MM Weber, GA Metzger… - US Patent …, 2009 - Google Patents
A laser processing system implements a method for aligning a probe element (eg, a probe
pin) with a device interface element (eg, a contact pad of a circuit substrate). First, the laser …

Optical coupling structure

T Keyser, G Hughes - US Patent 7,454,102, 2008 - Google Patents
BACKGROUND Optoelectronic integrated circuits (ICs) include both elec tronic and optical
elements Within a single chip. Typical elec tronic elements include? eld effect transistors …

Waveguide-to-waveguide couplers with multiple tapers

Y Bian, AP Jacob, SM Shank - US Patent 10,429,582, 2019 - Google Patents
Waveguide-to-waveguide couplers, systems that include waveguide-to-waveguide couplers,
and methods of fabricating waveguide-to-waveguide couplers. A first waveguide is coupled …

Probe module for testing chips with electrical and optical input/output interconnects, methods of use, and methods of fabrication

HD Thacker, OO Ogunsola, JD Meindl - US Patent 7,348,786, 2008 - Google Patents
BACKGROUND In the current manufacture of semiconductor devices, functionality of
electrical devices is verified at the wafer level by automated test equipment using probe …

Efficient silicon-on-insulator grating coupler

NN Yun-chung, H Rong - US Patent 8,625,942, 2014 - Google Patents
An efficient grating coupler for a semiconductor optical mode includes a tapered edge to
couple light between waveguide modes constrained by differing waveguide thicknesses. An …

Optical resonator gyro with integrated external cavity beam generator

G Hughes, GA Sanders, LK Strandjord - US Patent 7,463,360, 2008 - Google Patents
The portion of the first light beam propagates in a first 4,135,822 A 1, 1979 Ezekiel counter-
propagating direction, and the portion of the second 4,234,357. A 1 1/1980 Scheppele light …

Probe card for testing in-wafer photonic integrated circuits (PICs) and method of use

FA Kish Jr, FH Peters, RL Nagarajan… - US Patent …, 2010 - Google Patents
---(57) ABSTRACT (60) Division of application No. 10/317,935, filed on Dec. 11, 2002, which
is a continuation of application No. Method and apparatus for utilizing a probe card for …

Wafer-scale testing of photonic integrated circuits using horizontal spot-size converters

D Vermeulen, L Chen, C Doerr - US Patent 9,922,887, 2018 - Google Patents
US9922887B2 - Wafer-scale testing of photonic integrated circuits using horizontal spot-size
converters - Google Patents US9922887B2 - Wafer-scale testing of photonic integrated …

Test systems and methods for chips in wafer scale photonic systems

A Novack, MA Streshinsky, MJ Hochberg - US Patent 10,359,567, 2019 - Google Patents
A qualification apparatus for a photonic chip on a wafer that leaves undisturbed an edge
coupler that provides an operating port for the photonic devices or circuits on the chip during …

Test apparatus having optical interface and test method

S Masuda - US Patent 8,907,696, 2014 - Google Patents
There is provided a test apparatus for testing a device under test, including a test signal
generator that generates a test signal to test the device under test, an electric-photo …