Microsystem or micro-electro-mechanical system (MEMS) is a revolutionary enabling
technology, that is responsible for many of the technological advancements over the past …

Mechanical quadrature coupling is one of the main sources of zero-rate output in
microelectromechanical system (MEMS) gyroscope, which limits the further improvement of …

The coupled micro resonator array (CMRA) is a new type chemical sensor that has been
developed to improve the performance of the electronic nose by increasing the number of …

The design, fabrication, and experimental test of an awl-shaped serpentine microspring
(ASSM) for providing in-plane motion and low spring constant-to-layout area are …

Even when made by brittle materials, awl-shaped serpentine microsprings (ASSMs) were
found to have a nonlinear displacement–force relationship similar to springs made by ductile …

In this paper, a new approach for a multilayer elastic beam to provide a driving force and
driving distance for a MEMS safe and arming system is presented. In particular this is …

Manufacturing variation in MEMS is inevitable due to the nature of the fabrication processes.
We quantify the variations and analyze its effect on the performance of a constant CMRA …

This paper presents an actuation mechanism based on the interdigitated comb drive MEMS
resonator. The important role of that device is to establish MEMS resonators for the second …

We report the design and implementation of a unique, wafer sized stretchable and bendable
monolithic silicon matrix structure. The achieved stretchability not only allows for one …

提供了一种用于近场无损检测研究的采用微悬臂梁进行接收超声波的动态检测技术,
借助COMSOL Multiphysics 有限元软件模拟了微悬臂梁传感器接收由超声换能器所产生的 …