MEMS-based uncooled infrared bolometer arrays: a review

F Niklaus, C Vieider… - … /MOEMS technologies and …, 2008 - spiedigitallibrary.org
Uncooled infrared bolometer arrays have become the technology of choice for low-cost
infrared imaging systems used in applications such as thermography, firefighting, driver …

[图书][B] Infrared detectors

A Rogalski - 2000 - taylorfrancis.com
Infrared Detectors provides comprehensive coverage of this important aspect of infrared
technology, including details of recent research efforts directed toward improving the …

[图书][B] Infrared and terahertz detectors

A Rogalski - 2019 - books.google.com
This new edition of Infrared and Terahertz Detectors provides a comprehensive overview of
infrared and terahertz detector technology, from fundamental science to materials and …

Uncooled two-microbolometer stack for long wavelength infrared detection

A Abdullah, A Koppula, O Alkorjia, M Almasri - Scientific Reports, 2023 - nature.com
We have investigated an uncooled infrared (IR) detector utilizing a dual level architecture.
This was achieved by combining two-microbolometer stack in the vertical direction to …

Tailoring bolometric properties of a TiOx/Ti/TiOx tri-layer film for integrated optical gas sensors

J Shim, J Lim, DM Geum, BH Kim, SY Ahn, SH Kim - Optics Express, 2021 - opg.optica.org
In this paper, we systematically investigated tailoring bolometric properties of a proposed
heat-sensitive TiO_x/Ti/TiO_x tri-layer film for a waveguide-based bolometer, which can play …

Fabrication and performance comparison of planar and sandwich structures of micro-bolometers with Ge thermo-sensing layer

M Moreno, A Kosarev, A Torres, R Ambrosio - Thin solid films, 2007 - Elsevier
Two types of micro-bolometer structures were fabricated with the same materials and
fabrication process. The structures are labeled planar and sandwich types. Their …

High temperature coefficient of resistance and low noise tungsten oxide doped amorphous vanadium oxide thin films for microbolometer applications

O Celik, M Duman - Thin Solid Films, 2019 - Elsevier
In this study, we report tungsten oxide (WO 3) doped vanadium target in order to sputter
amorphous vanadium tungsten oxide (a-VWO x) thin films by reactive direct-current …

Excess noise in vanadium tungsten oxide bolometric material

N Chi-Anh, S Moon - Infrared physics & technology, 2007 - Elsevier
Vanadium tungsten oxide is a promising bolometric material for thermal sensing
applications. Two samples with different vanadium tungsten oxide thickness were prepared …

Sputter deposited GeSn alloy: A candidate material for temperature sensing layers in uncooled microbolometers

M Abdel-Rahman, M Alduraibi, M Hezam… - Infrared Physics & …, 2019 - Elsevier
In this paper, we study the resistance versus temperature characteristics of Ge 1-x Sn x thin
film alloys to assess the possibility of using them for temperature sensing layers in …

Study of boron doped amorphous silicon lightly hydrogenated prepared by DC magnetron sputtering for infrared detectors applications

K Ketroussi, R Cherfi, HY Seba, S Tata… - Infrared Physics & …, 2021 - Elsevier
The objective of this study is to investigate the effect of boron doping concentration on the
bolometric properties of lightly hydrogenated amorphous silicon doped with boron (a-Si: H …