J Choy, C Feng, P Nikkel - US Patent 8,902,023, 2014 - Google Patents
An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered …
J Larson III, S Mishin - US Patent 9,243,316, 2016 - Google Patents
In accordance with a representative embodiment, a method of fabricating a piezoelectric material comprising a first component and a second component comprises: providing a …
M Omura - US Patent 10,615,774, 2020 - Google Patents
In an elastic wave device, a piezoelectric substrate is stacked on a support substrate and an IDT electrode is provided on the piezoelectric substrate. Wiring line portions are provided on …
AA Shirakawa, P Bradley, D Burak, S Bader… - US Patent …, 2013 - Google Patents
A stacked bulk acoustic resonator includes a first piezoelectric layer stacked on a first electrode, a second electrode stacked on the first piezoelectric layer; a second piezoelectric …
J Choy, C Feng, P Nikkel, K Grannen - US Patent 9,450,561, 2016 - Google Patents
A bulk acoustic wave (BAW) resonator, comprises: a first electrode; a second electrode comprising a plurality of sides. At least one of the sides comprises a cantilevered portion …
D Burak, P Nikkel, J Kaitila, JD Larson III… - US Patent …, 2015 - Google Patents
A bulk acoustic wave (BAW) structure includes a first electrode disposed over a substrate, a piezoelectric layer disposed over the first electrode, and a second electrode disposed over …
D Burak - US Patent 9,154,112, 2015 - Google Patents
In accordance with a representative embodiment, a bulk acoustic wave (BAW) resonator structure, comprises: a first BAW resonator comprising a first lower electrode, a first upper …
D Burak, J Choy, P Nikkel - US Patent 9,099,983, 2015 - Google Patents
A bulk acoustic wave (BAW) resonator device includes an acoustic reflector formed over a substrate and a resonator stack formed over the acoustic reflector. The acoustic reflector …