Acoustic resonator structure comprising a bridge

J Choy, C Feng, P Nikkel - US Patent 8,248,185, 2012 - Google Patents
4,798,990 4,819,215 4,836,882 4,841,429 4,906,840 5,048,036 5,048,038 5,066,925
5,075,641 5,111,157 5,118,982 5,129,132 5,162,691 5,166,646 5,185.589 5,214,392 …

Piezoelectric resonator structures and electrical filters having frame elements

T Jamneala, RC Ruby - US Patent 8,981,876, 2015 - Google Patents
4,344,004 4,355,408 4,456,850 4,529,904 4,608,541 4,625,138 4,633.285 4,640,756
4,719,383 4,769,272 4,798,990 4,819,215 4,836,882 4,841,429 4,906,840 4,933,743 …

Acoustic resonator structure having an electrode with a cantilevered portion

J Choy, C Feng, P Nikkel - US Patent 8,902,023, 2014 - Google Patents
An acoustic resonator comprises a first electrode and second electrode comprising a
plurality of sides. At least one of the sides of the second electrode comprises a cantilevered …

Method of fabricating piezoelectric material with selected c-axis orientation

J Larson III, S Mishin - US Patent 9,243,316, 2016 - Google Patents
In accordance with a representative embodiment, a method of fabricating a piezoelectric
material comprising a first component and a second component comprises: providing a …

Elastic wave device and manufacturing method therefor

M Omura - US Patent 10,615,774, 2020 - Google Patents
In an elastic wave device, a piezoelectric substrate is stacked on a support substrate and an
IDT electrode is provided on the piezoelectric substrate. Wiring line portions are provided on …

Stacked bulk acoustic resonator

AA Shirakawa, P Bradley, D Burak, S Bader… - US Patent …, 2013 - Google Patents
A stacked bulk acoustic resonator includes a first piezoelectric layer stacked on a first
electrode, a second electrode stacked on the first piezoelectric layer; a second piezoelectric …

Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with varying amounts of dopant

J Choy, C Feng, P Nikkel, K Grannen - US Patent 9,450,561, 2016 - Google Patents
A bulk acoustic wave (BAW) resonator, comprises: a first electrode; a second electrode
comprising a plurality of sides. At least one of the sides comprises a cantilevered portion …

Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer

D Burak, P Nikkel, J Kaitila, JD Larson III… - US Patent …, 2015 - Google Patents
A bulk acoustic wave (BAW) structure includes a first electrode disposed over a substrate, a
piezoelectric layer disposed over the first electrode, and a second electrode disposed over …

Coupled resonator filter comprising a bridge

D Burak - US Patent 9,154,112, 2015 - Google Patents
In accordance with a representative embodiment, a bulk acoustic wave (BAW) resonator
structure, comprises: a first BAW resonator comprising a first lower electrode, a first upper …

Bulk acoustic wave resonator device comprising a bridge in an acoustic reflector

D Burak, J Choy, P Nikkel - US Patent 9,099,983, 2015 - Google Patents
A bulk acoustic wave (BAW) resonator device includes an acoustic reflector formed over a
substrate and a resonator stack formed over the acoustic reflector. The acoustic reflector …