MEMS resonators exhibit rich dynamic behaviors under the internal resonance regime. In
this work, we present a novel MEMS bifurcation sensor that exploits frequency unlocking …

Since the discovery of the electron, the accurate detection of electrical charges has been a
dream of the scientific community. Owing to some remarkable advantages, micro …

Electric field sensors (EFSs) are widely used in various fields, particularly in accurately
assessing atmospheric electric fields and high-voltage power lines. Precisely detecting …

Real-time monitoring of minute quantities of charge plays an important role in quantum-
physics research and electrical measurements within modern high-end scientific …

This paper demonstrates a resonant accelerometer employing weakly coupled resonators
for inertial force transduction. An ultra-low virtual mode coupling is established by employing …

This paper proposes a prototype of micro-electromechanical frequency modulation
electrometers based on pre-bias charge mechanism with a single-anchor circular beam …

In this paper, two methods for reducing the nonlinearities in microelectromechanical systems
flexural beams resonators have been demonstrated with established theoretical models and …

Compared with the classic frequency-modulated resonant sensors, the recently emerging
sensing scheme based on the mode localization phenomenon of the weakly coupled …

In this paper, the effect of nonlinearity on axial force sensitivity is investigated in a T-shaped
micromechanical tuning fork resonator. Firstly, a unified model of this resonator for both in …

Electrostatic charge sensing is of fundamental significance for physical, chemical, and
biological detection devices. Almost all current approaches with high resolution are based …