State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review

V Pachkawade - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

Linear sensing for mode-localized sensors

H Zhang, J Yang, W Yuan, H Chang - Sensors and Actuators A: Physical, 2018 - Elsevier
The sensitivity of the resonant sensors has been proven to be enhanced by more than two
orders of magnitude using mode localization of the weakly coupled resonators as the …

Utilizing energy localization in weakly coupled nonlinear resonators for sensing applications

M Pandit, C Zhao, G Sobreviela, S Du… - Journal of …, 2019 - ieeexplore.ieee.org
In this paper, energy localization within weakly coupled nonlinear MEMS resonators has
been utilized for sensing applications. The sensitivity and the noise floor of the weakly …

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

Y Zhu, Z Zhao, Z Fang, L Du - Micromachines, 2021 - mdpi.com
Single-resonator-based (SRB) sensors have thrived in many sensing applications. However,
they cannot meet the high-sensitivity requirement of future high-end markets such as ultra …

Ultimate limits of differential resonant MEMS sensors based on two coupled linear resonators

J Juillard, P Prache, PM Ferreira… - IEEE transactions on …, 2018 - ieeexplore.ieee.org
In this paper, we investigate how additive noise, eg, thermomechanical noise, impacts the
resolution of mode-localized resonant sensing architectures based on two passively …

Resolution limit of mode-localised sensors

Z Zhang, H Chang - Science China Information Sciences, 2021 - Springer
In recent years, the mode localisation phenomenon of weakly coupled resonators has been
successfully utilised to improve the sensitivity of microelectromechanical system (MEMS) …

Mode localized artificial hair sensor with enhanced linearity applied for dual-axis air flow sensing

X Guo, B Yang, C Li, Z Liang - Journal of Micromechanics and …, 2020 - iopscience.iop.org
The weakly coupled resonators based on mode localization are promising in emerging
signal measurement fields due to the verified relative mechanical sensitivity enhancement …

Direct measuring the amplitude ratios of weakly coupled resonators employing automatic amplitude control

X Guo, B Yang, C Li, Z Liang… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
Since the eigenstate-modulated weakly coupled resonators (WCRs) characterize the
detected signals by measuring the amplitude ratios of weakly coupled resonant units, the …

Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing

P Prache, J Juillard, PM Ferreira, N Barniol… - Sensors and Actuators A …, 2018 - Elsevier
This paper presents a proof of concept of a differential sensor based on the phase-difference
of two injection-locked MEMS resonators, strongly coupled through their actuation voltages …

Oscillatory airflow sensing employing MEMS weakly coupled resonators

X Guo, B Yang, C Li, Z Liang - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This paper, for the first time, investigates the oscillatory airflow sensing application of weakly
coupled resonators (WCRs) based on a mode-localized flow sensor. The kinetics of WCRs …