This paper demonstrates that polarization plays an important role in the formation of
interference patterns, pattern contrasts, and periods in four-beam interference lithography …

Periodic and quasi-periodic structures on silicon surface have numerous significant
applications in photoelectronics and surface engineering. A number of technologies have …

This paper discusses the effects of laser fluence on silicon modification by four-beam laser
interference. In this work, four-beam laser interference was used to pattern single crystal …

This paper presents a method to obtain periodic structures with different feature shapes
using direct laser interference lithography. In the method, the desired structures are …

Periodic and quasi-periodic structures on silicon surface have numerous significant
applications in photoelectronics and surface engineering. A number of technologies have …

This paper discusses the effect of pulse repetition rates on silicon wafer modification by four-
beam laser interference. In the work, four-beam laser interference was used to pattern single …

This research comprehensively reviews the properties of regular micro and nano structures
fabricated by laser interference lithography and reports on their applications in the …