Thermoelastic damping (TED) is one of the main energy dissipation sources of high
performance resonators at room temperature, however, the classical TED model fails at the …

A micro machined accelerometer based on an area variation capacitive sensing for more
applications was developed, in this case, we will describe and improve in this work the …

This paper describes a CMOS capacitive sensing amplifier for a monolithic MEMS
accelerometer fabricated by post-CMOS surface micromachining. This chopper stabilized …

In view of the large scientific and technical interest in the MEMS accelerometer sensor and
the limitations of capacitive, resistive piezo, and piezoelectric methods, we focus on the …

This paper presents a 2.5-V 14-bit fully differential/spl Sigma//spl Delta/interface circuit in
0.25-/spl mu/m CMOS technology for a high-resolution silicon-on-insulator capacitive …

This paper presents a new fabrication approach and design for a three axis capacitive
MEMS accelerometer that is capable of measuring externally applied accelerations in three …

As miniaturization, batch fabrication, and integrated electronics rapidly enable the
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …

A gyroscope with a measured noise floor of 0.02°/s/Hz 1 2/at 5 Hz is fabricated by post-
CMOS micromachining that uses interconnect metal layers to mask the structural etch steps …

This paper presents a high-performance three-axis capacitive microelectromechanical
system (MEMS) accelerometer implemented by fabricating individual lateral and vertical …

Sensing systems-on-chip (SSoCs), combining micromachined sensing structures and
microelectronic building blocks on a single chip, are reviewed. While single-chip pressure …