A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits
A generalized foundry-oriented CMOS-MEMS platform well suited for integrated
micromechanical resonators alongside IC amplifiers has been developed for commercial …
micromechanical resonators alongside IC amplifiers has been developed for commercial …
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- 22-MHz Polysilicon Clamped-Clamped Beam Resonators
This letter presents the design, fabrication, and demonstration of a CMOS–MEMS filter
based on two high-Q submicrometer-scale clamped–clamped beam resonators with …
based on two high-Q submicrometer-scale clamped–clamped beam resonators with …
Design of Spring Coupling for High- High-Frequency MEMS Filters for Wireless Applications
MM Shalaby, MA Abdelmoneum… - IEEE Transactions on …, 2009 - ieeexplore.ieee.org
A second-order microelectromechanical systems (MEMS) filter with high selectivity and
sharp rolloff is required in wireless transceivers used in dense wireless sensor networks …
sharp rolloff is required in wireless transceivers used in dense wireless sensor networks …
Platform development for CMOS-MEMS multi-gap capacitive transducers
This work, for the first time, presents a platform for designing microelectromechanical system
(MEMS) capacitive transducers featuring multiple transduction gaps implemented by a …
(MEMS) capacitive transducers featuring multiple transduction gaps implemented by a …
Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
A Roy, BQ Ta, M Azadmehr… - Microsystems & …, 2023 - nature.com
Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters
by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of …
by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of …
Cmos-integrated rf mems resonators
MK Zalalutdinov, JD Cross, JW Baldwin… - Journal of …, 2010 - ieeexplore.ieee.org
We present a design approach that enables monolithic integration of high-quality-factor (Q)
radio-frequency (RF) microelectromechanical systems (MEMS) resonators with CMOS …
radio-frequency (RF) microelectromechanical systems (MEMS) resonators with CMOS …
Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure
SE Luce, AK Stamper - US Patent 8,629,036, 2014 - Google Patents
BACKGROUND Bulk Acoustic Wave (BAW) filter and Bulk Acoustic Reso nator (BAR) are
gaining more popularly for their perfor mance benefits and are being utilized in the design of …
gaining more popularly for their perfor mance benefits and are being utilized in the design of …
Differentially piezoresistive sensing for CMOS-MEMS resonators
A foundry-oriented capacitively driven CMOS-MEMS resonator using differentially
piezoresistive sensing is successfully demonstrated to enable effective feedthrough …
piezoresistive sensing is successfully demonstrated to enable effective feedthrough …
A monolithically integrated torsional CMOS-MEMS relay
We report experimental demonstrations of a torsional microelectromechanical (MEM) relay
fabricated using the CMOS-MEMS approach (or intra-CMOS) which exploits the full foundry …
fabricated using the CMOS-MEMS approach (or intra-CMOS) which exploits the full foundry …