This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS
(Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine …

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However,
they cannot meet the high-sensitivity requirement of future high-end markets such as ultra …

This paper reports on the design, and implementation of piezoelectric-on-silicon MEMS
resonators installed within a portable experimental setup for sensing nanoparticles in a …

In this paper, a novel vertically arranged double-electrodes A 0 mode Lamb-wave AlN
resonator on SOI substrate with a high electromechanical coupling coefficient and high …

The evaluation of a sensitive MEMS particulate matter monitoring (PM) system is presented.
The sensor module comprises of a bulk acoustic wave piezoelectric MEMS resonator …

Electrically powered devices and machines with electronic components require precise
timing to function properly. The need for accuracy has become increasingly critical with the …