Beam steering is essential for a variety of optical applications such as communication,
LIDAR, and imaging. Microelectromechanical system (MEMS) mirrors are an effective …

Here, we discuss a novel, mixed mode 3D XYZ scanner built within a single foundry
process. The device has a large range of motion in X, Y, and Z (14.1 μm in X and Y and 97.9 …

This paper presents a control algorithm for a micro-electro-mechanical system (MEMS) fast
steering mirror (FSM), whose performance is poor in open loop control mode. Based on the …

In this paper, we discuss the use of pulse width modulation (PWM) to control analog MEMS
devices. We achieve a precise linear analog control of MEMS by applying PWM signal with …

Command shaping is a driving technique for handling the large settling time of the high-Q-
MEMS actuators. The strong nonlinearity due to the electrostatic actuation limits the linear …

Optical systems typically use galvanometers (galvos) and scanners. Galvos move, quasi-
statically, from one static position to another. Scanners move in an oscillatory fashion …

There is a world-wide push to create the next-generation all-optical transmission and
switching technologies for exascale data centers. In this paper we focus on the switching …

Inductive circuits and devices are ubiquitous and important design elements in many
applications, such as magnetic drives, galvanometers, magnetic scanners, applying direct …

Optical systems typically use galvanometers (aka galvos) and scanners. Galvos move
optical elements such as mirrors, quasi-statically, from one static position to another, and an …

Image distortion is one of the most common problems of optical receivers. Adaptive Optics
(AO) technology was invented to solve that issue for ground-based telescopes. The …