S Flachowsky, A Wei, R Illgen… - … on Electron Devices, 2010 - ieeexplore.ieee.org
Strain greatly affects the electrical properties of silicon because strain changes the energy band structure of silicon. In MOSFET devices, the terminal voltages induce electrical fields …
CK Maiti, S Chattopadhyay, LK Bera - 2007 - taylorfrancis.com
A combination of the materials science, manufacturing processes, and pioneering research and developments of SiGe and strained-Si have offered an unprecedented high level of …
L Gomez, I Aberg, JL Hoyt - IEEE electron device letters, 2007 - ieeexplore.ieee.org
The electron effective mobility in ultrathin-body n-channel metal-oxide-semiconductor field- effect transistors fabricated on Ge-free 30% strained-Si directly on insulator (SSDOI) is …
N Collaert, R Rooyackers, F Clemente… - 2006 Symposium on …, 2006 - ieeexplore.ieee.org
This paper describes the performance of nMOS and pMOS tall triple gate (MUGFET) devices with fin widths down to 20 nm fabricated for the first time on super critical strained Si on …
J Liang, C Sun, H Xu, EYJ Kong… - … on Electron Devices, 2022 - ieeexplore.ieee.org
In the first part of this two-part article, implant-induced strain relaxation has been successfully demonstrated on a common strained silicon-on-insulator (SSOI) platform. In this …
This work shows a comparison between the analog performance of standard and strained Si n-type triple-gate FinFETs with high-κ dielectrics and TiN gate material. Different channel …
S Baudot, F Andrieu, O Faynot, J Eymery - Solid-state electronics, 2010 - Elsevier
Fully depleted silicon-on-insulator (FDSOI) n and pMOSFETs (Metal–Oxide–Semiconductor- Field-Effect-Transistors) are integrated with a TiN/HfO2 gate stack on 1.55 GPa strained SOI …
M Wiatr, T Feudel, A Wei, A Mowry… - 2007 15th …, 2007 - ieeexplore.ieee.org
We have extensively studied stress enhancing techniques to increase channel mobility starting at the 130 nm technology node and continued this towards the 45 nm node …
T Shimura, D Shimokawa, T Matsumiya… - Current Applied …, 2012 - Elsevier
We investigated the crystalline quality of supercritical-thickness strained silicon-on-insulator (SC-sSOI) wafers by synchrotron X-ray topography and its correlation with electrical …