Carrier-transport-enhanced channel CMOS for improved power consumption and performance

S Takagi, T Iisawa, T Tezuka, T Numata… - IEEE transactions on …, 2007 - ieeexplore.ieee.org
An effective way to reduce supply voltage and resulting power consumption without losing
the circuit performance of CMOS is to use CMOS structures using high carrier …

Understanding strain-induced drive-current enhancement in strained-silicon n-MOSFET and p-MOSFET

S Flachowsky, A Wei, R Illgen… - … on Electron Devices, 2010 - ieeexplore.ieee.org
Strain greatly affects the electrical properties of silicon because strain changes the energy
band structure of silicon. In MOSFET devices, the terminal voltages induce electrical fields …

[图书][B] Strained-Si heterostructure field effect devices

CK Maiti, S Chattopadhyay, LK Bera - 2007 - taylorfrancis.com
A combination of the materials science, manufacturing processes, and pioneering research
and developments of SiGe and strained-Si have offered an unprecedented high level of …

Electron transport in strained-silicon directly on insulator ultrathin-body n-MOSFETs with body thickness ranging from 2 to 25 nm

L Gomez, I Aberg, JL Hoyt - IEEE electron device letters, 2007 - ieeexplore.ieee.org
The electron effective mobility in ultrathin-body n-channel metal-oxide-semiconductor field-
effect transistors fabricated on Ge-free 30% strained-Si directly on insulator (SSDOI) is …

Performance enhancement of MUGFET devices using super critical strained-SOI (SC-SSOI) and CESL

N Collaert, R Rooyackers, F Clemente… - 2006 Symposium on …, 2006 - ieeexplore.ieee.org
This paper describes the performance of nMOS and pMOS tall triple gate (MUGFET) devices
with fin widths down to 20 nm fabricated for the first time on super critical strained Si on …

Strained silicon-on-insulator platform for co-integration of logic and RF—Part II: Comb-like device architecture

J Liang, C Sun, H Xu, EYJ Kong… - … on Electron Devices, 2022 - ieeexplore.ieee.org
In the first part of this two-part article, implant-induced strain relaxation has been
successfully demonstrated on a common strained silicon-on-insulator (SSOI) platform. In this …

Analog performance of standard and strained triple-gate silicon-on-insulator nFinFETs

MA Pavanello, JA Martino, E Simoen… - Solid-State …, 2008 - Elsevier
This work shows a comparison between the analog performance of standard and strained Si
n-type triple-gate FinFETs with high-κ dielectrics and TiN gate material. Different channel …

Electrical and diffraction characterization of short and narrow MOSFETs on fully depleted strained silicon-on-insulator (sSOI)

S Baudot, F Andrieu, O Faynot, J Eymery - Solid-state electronics, 2010 - Elsevier
Fully depleted silicon-on-insulator (FDSOI) n and pMOSFETs (Metal–Oxide–Semiconductor-
Field-Effect-Transistors) are integrated with a TiN/HfO2 gate stack on 1.55 GPa strained SOI …

Review on process-induced strain techniques for advanced logic technologies

M Wiatr, T Feudel, A Wei, A Mowry… - 2007 15th …, 2007 - ieeexplore.ieee.org
We have extensively studied stress enhancing techniques to increase channel mobility
starting at the 130 nm technology node and continued this towards the 45 nm node …

Synchrotron X-ray topography of supercritical-thickness strained silicon-on-insulator wafers for crystalline quality evaluation and electrical characterization using back …

T Shimura, D Shimokawa, T Matsumiya… - Current Applied …, 2012 - Elsevier
We investigated the crystalline quality of supercritical-thickness strained silicon-on-insulator
(SC-sSOI) wafers by synchrotron X-ray topography and its correlation with electrical …