Laser-induced periodic surface structures (LIPSS)

J Bonse, SV Kirner, J Krüger - Handbook of laser micro-and nano …, 2020 - Springer
Laser-induced periodic surface structures (LIPSS) are a universal phenomenon and can be
generated on almost any material by irradiation with linearly polarized radiation. This …

Relaxation dynamics of femtosecond-laser-induced temperature modulation on the surfaces of metals and semiconductors

Y Levy, TJY Derrien, NM Bulgakova, EL Gurevich… - Applied Surface …, 2016 - Elsevier
Formation of laser-induced periodic surface structures (LIPSS) is a complicated
phenomenon which involves periodic spatial modulation of laser energy absorption on the …

Crystal cleavage, periodic nanostructure and surface modification of SiC ablated by femtosecond laser in different media

C Wu, X Fang, Q Kang, H Sun, L Zhao, B Tian… - Surface and Coatings …, 2021 - Elsevier
SiC, as one typical 3rd generation semiconductor, has high potential to be used as the
substrate for harsh environment sensors. However, the etching of this material is still …

Formation of laser-induced periodic surface structures on reaction-bonded silicon carbide by femtosecond pulsed laser irradiation

T Meshram, J Yan - Nanomanufacturing and Metrology, 2023 - Springer
Reaction-bonded silicon carbide (RB-SiC) is an excellent engineering material with high
hardness, stiffness, and resistance to chemical wear. However, its widespread use is …

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

R Zhang, C Huang, J Wang, S Feng, H Zhu - Materials Science in …, 2021 - Elsevier
An experimental study is conducted to investigate the multi-length scale evolution from
micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the …

A Review of Femtosecond Laser Processing of Silicon Carbide

Q Wang, R Zhang, Q Chen, R Duan - Micromachines, 2024 - mdpi.com
Silicon carbide (SiC) is a promising semiconductor material as well as a challenging
material to machine, owing to its unique characteristics including high hardness, superior …

Extending ultra-short pulse laser texturing over large area

G Mincuzzi, L Gemini, M Faucon, R Kling - Applied Surface Science, 2016 - Elsevier
Abstract Surface texturing by Ultra-Short Pulses Laser (UPL) for industrial applications
passes through the use of both fast beam scanning systems and high repetition rate, high …

Femtosecond ablation of silicon in acetone: tunable photoluminescence from generated nanoparticles and fabrication of surface nanostructures

S Hamad, GK Podagatlapalli… - The Journal of …, 2014 - ACS Publications
Silicon (Si) nanoparticles (NPs) and self-organized high spatial frequency laser (HSFL)
induced periodic surface structures were fabricated by means of femtosecond ablation of …

Study on the influence of material properties in femtosecond laser ablation of 6H-SiC in water and SERS-based applications

KR Kumar, J Rathod, MSS Bharathi, RSP Goud… - Optics …, 2024 - opg.optica.org
We report on the formation of SiC nanoparticles coated with graphene oxide layers by
femtosecond (fs) laser ablation of 6H-SiC (n-type and semi-insulating V-doped) in deionized …

Crackless femtosecond laser percussion drilling of SiC by suppressing shock wave magnitude

J Hattori, Y Ito, N Sugita - CIRP Annals, 2023 - Elsevier
Femtosecond lasers have attracted attention as tools for the microfabrication of various
materials, such as semiconductors, insulators, and metals. When hard and brittle materials …