A review: green chemical mechanical polishing for metals and brittle wafers
L Liu, Z Zhang, B Wu, W Hu, F Meng… - Journal of Physics D …, 2021 - iopscience.iop.org
Chemical mechanical polishing (CMP) is the most effective technique to obtain global and
local planarization of metal and brittle surfaces. Conventionally, CMP slurries contain strong …
local planarization of metal and brittle surfaces. Conventionally, CMP slurries contain strong …
Design of composite abrasives and substrate materials for chemical mechanical polishing applications
F Meng, Z Zhang, P Gao, T Liu, Y Boyjoo, D Guo - Applied Nanoscience, 2020 - Springer
Chemical mechanical polishing (CMP) has attracted much attention for high-performance
manufacturing and setups, in which the surface roughness R a is required to be less than 1 …
manufacturing and setups, in which the surface roughness R a is required to be less than 1 …
A novel approach of chemical mechanical polishing for cadmium zinc telluride wafers
A novel approach of chemical mechanical polishing (CMP) is developed for cadmium zinc
telluride (CdZnTe or CZT) wafers. The approach uses environment-friendly slurry that …
telluride (CdZnTe or CZT) wafers. The approach uses environment-friendly slurry that …
Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing
The chemical mechanical polishing (CMP) technology has been widely used for surface
modification of critical materials and components with high quality and efficiency. In a typical …
modification of critical materials and components with high quality and efficiency. In a typical …
New deformation mechanism of soft-brittle CdZnTe single crystals under nanogrinding
The deformation of cadmium zinc telluride (CZT) soft-brittle single crystals under
nanogrinding was investigated using high-resolution transmission electron microscopy. In …
nanogrinding was investigated using high-resolution transmission electron microscopy. In …
Anomalous behavior of epitaxial indium nano-contacts on cadmium-zinc-telluride
A Ruzin, O Sinkevich, G Cohen-Taguri… - Applied Physics …, 2012 - pubs.aip.org
In this work, experimental characterization results of indium nano-contacts are presented.
The indium nano-contacts are epitaxially grown on a two-dimensional surface of high …
The indium nano-contacts are epitaxially grown on a two-dimensional surface of high …
Self-assembled formation and transformation of In/CdZnTe (110) nano-rings into camel-humps
G Cohen-Taguri, A Ruzin, I Goldfarb - Applied Physics Letters, 2012 - pubs.aip.org
We used in situ scanning tunneling microscopy to monitor in real time the formation of nano-
rings at the molecular beam epitaxially grown In/CdZnTe ( 110) surface, and Auger …
rings at the molecular beam epitaxially grown In/CdZnTe ( 110) surface, and Auger …
Conducting-Probe Atomic Force Microscopy of Electrochemical Interfaces
PA VENEMAN, KJ STEVENSON - SV Kalinin and DA Bonnell …, 2013 - books.google.com
Energy related materials research receives a great deal of attention as a necessary
consequence of our ever growing energy consumption, coupled with the apparent need to …
consequence of our ever growing energy consumption, coupled with the apparent need to …