High performance LaNiO3-buffered,(001)-oriented PZT piezoelectric films integrated on (111) Si
Y Wang, J Ouyang, H Cheng, Y Shi… - Applied Physics …, 2022 - pubs.aip.org
Integration of high-performance lead zirconate titanate (PZT) piezoelectric films onto (111) Si
substrates is beneficial for the development of piezoelectric micro-electro-mechanical …
substrates is beneficial for the development of piezoelectric micro-electro-mechanical …
SI 单位变革下原子尺度扫描探针显微术的计量空间
李剑桥， 施玉书， 王芳， 李伟 - 计量科学与技术, 2024 - jlkj.nim.ac.cn
2018 年第26 届国际计量大会建议采用硅220 晶面间距作为米定义的复现方法之一,
以满足不断缩小的物理尺寸对原子级准确度计量的需求. 目前能直接表征硅晶格的仪器主要有X …
以满足不断缩小的物理尺寸对原子级准确度计量的需求. 目前能直接表征硅晶格的仪器主要有X …
内禀硅晶格常数的22 纳米线宽标准器研制
王芳， 施玉书， 张树 - 计量科学与技术, 2024 - jlkj.nim.ac.cn
纳米线宽作为典型纳米几何特征参量之一, 其量值准确性对于先进制造等领域尤为重要.
随着纳米尺度向着极小尺寸发展, 测量精度要求达到亚纳米级, 这给纳米线宽的精确测量带来了 …
随着纳米尺度向着极小尺寸发展, 测量精度要求达到亚纳米级, 这给纳米线宽的精确测量带来了 …
Sub-Micron Linewidth Measurement based on Improved Image Sub-Pixel Edge Detection Algorithm
Y Tian, G Lu, X Bi - 2024 IEEE International Conference on …, 2024 - ieeexplore.ieee.org
Recent advancement in micro-and nano-scale production and manufacturing objects in
fields such as semiconductors and biomedicine have proved the great need for …
fields such as semiconductors and biomedicine have proved the great need for …
Development of a 22 Nano Line Width Standard Based on Intrinsic SiliconLattice Constants
W Fang, SHI Yushu, Z Shu - Metrology Science and Technology, 2024 - jlkj.nim.ac.cn
The measurement accuracy of nano line widths, a critical nano geometric characteristic
parameter, is of paramount importance in fields such as advanced manufacturing. As the …
parameter, is of paramount importance in fields such as advanced manufacturing. As the …