Piezoelectric biomaterials inspired by nature for applications in biomedicine and nanotechnology

S Chen, X Tong, Y Huo, S Liu, Y Yin, ML Tan… - Advanced …, 2024 - Wiley Online Library
Bioelectricity provides electrostimulation to regulate cell/tissue behaviors and functions. In
the human body, bioelectricity can be generated in electromechanically responsive tissues …

Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng… - Journal of Micromechanics …, 2021 - iopscience.iop.org
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

X-ray diffraction of III-nitrides

MA Moram, ME Vickers - Reports on progress in physics, 2009 - iopscience.iop.org
The III-nitrides include the semiconductors AlN, GaN and InN, which have band gaps
spanning the entire UV and visible ranges. Thin films of III-nitrides are used to make UV …

Reactive sputtering of aluminum nitride (002) thin films for piezoelectric applications: A review

A Iqbal, F Mohd-Yasin - Sensors, 2018 - mdpi.com
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …

The piezoresistive effect of SiC for MEMS sensors at high temperatures: A review

HP Phan, DV Dao, K Nakamura… - Journal of …, 2015 - ieeexplore.ieee.org
Silicon carbide (SiC) is one of the most promising materials for applications in harsh
environments thanks to its excellent electrical, mechanical, and chemical properties. The …

Thin-film piezoelectric MEMS

CB Eom, S Trolier-McKinstry - Mrs Bulletin, 2012 - cambridge.org
Major challenges have emerged as microelectromechanical systems (MEMS) move to
smaller size and increased integration density, while requiring fast response and large …

Gallium nitride as an electromechanical material

M Rais-Zadeh, VJ Gokhale, A Ansari… - Journal of …, 2014 - ieeexplore.ieee.org
Gallium nitride (GaN) is a wide bandgap semiconductor material and is the most popular
material after silicon in the semiconductor industry. The prime movers behind this trend are …

Si-based MEMS resonant sensor: A review from microfabrication perspective

G Verma, K Mondal, A Gupta - Microelectronics Journal, 2021 - Elsevier
With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …

A review of principles of MEMS pressure sensing with its aerospace applications

Y Javed, M Mansoor, IA Shah - Sensor Review, 2019 - emerald.com
Purpose Pressure, being one of the key variables investigated in scientific and engineering
research, requires critical and accurate measurement techniques. With the advancements in …

Coupling of piezoelectric effect with electrochemical processes

MB Starr, X Wang - Nano Energy, 2015 - Elsevier
The coupling effect between piezoelectric polarization and electrochemical processes
makes possible the engineering of charge-carrier conduction characteristics at the …