[HTML][HTML] An Arbitrary Lagrangian Eulerian approach for estimating energy dissipation in micromirrors

D Di Cristofaro, A Opreni, M Cremonesi, R Carminati… - Actuators, 2022 - mdpi.com
Quantification and minimisation of energy consumption in resonant MEMS micromirrors is a
key aspect for a proper structural design. In this setting, the quality factor Q of the drive mode …