CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics
have been shown to yield unique and unprecedented functionalities with on-chip integration …

Complementary-metal-oxide-semiconductor (CMOS) and nanoelectromechanical (NEM)
hybrid reconfigurable circuits are implemented for the first time using three-dimensional (3D) …

The application of nanoelectromechanical (NEM) memory switches to field-programmable
gate arrays (FPGAs) has been proposed for the first time. NEM memory switches replace …

This paper presents a proof of concept of a differential sensor based on the phase-difference
of two injection-locked MEMS resonators, strongly coupled through their actuation voltages …

In this paper, we present the electrical characterization of the nonlinear tapping mode of the
nanorelays capacitively transduced. Such a characterization is carried out utilizing three …

Considering the isotropic release process of nanoelectromechanical systems (NEMSs),
defining the active region of NEM memory switches is one of the most challenging process …

We report experimental demonstrations of a torsional microelectromechanical (MEM) relay
fabricated using the CMOS-MEMS approach (or intra-CMOS) which exploits the full foundry …

This paper presents the results on the design, fabrication and characterization of a cantilever-
type NEM relay featuring a hammer-shaped tip and built in the back end of a conventional …

Considering the isotropic release process for nanoelectromechanical (NEM) devices,
defining the specific sacrificial layer of the inter-metal-dielectric (IMD), ie, the active region …

Electrostatically-actuated Micro-Electro-Mechanical/Nano-Electro-Mechanical (MEM/NEM)
relays are promising devices overcoming the energy-efficiency limitations of CMOS …