Research on Performance of Porous Scaffold-Based Getter Activated by Induction Heating and Its Application in MEMS Device
K Zheng, T Wang, M Wu, D Gu, W Lv, L Wang - Vacuum, 2024 - Elsevier
Non-evaporable getter (NEG) is widely used in vacuum packaging. However, there are two
main contradictions. Firstly, the contradiction between bonding temperature of the device …
main contradictions. Firstly, the contradiction between bonding temperature of the device …