A Yoshikawa, S Ushida, K Nagase,
M Iwaya… - Applied Physics …, 2017 - pubs.aip.org
An Al 0.6 Ga 0.4 N/Al 0.5 Ga 0.5 N metal–semiconductor–metal (MSM) deep-ultraviolet
(DUV) photodetector was developed. It possesses both high photosensitivity and high …