A first-principles density functional theory study has been carried out to investigate the
etching and corrosion of aluminum with fluorine-based plasma. Aluminum is modeled with …

C–F polymer redeposition is generated on the etched sidewall of the patterned air‐bearing
surface (ABS). This C–F polymer is a by‐product from fluorine‐based plasma using a …

US8343363B1 - Method and system for fabricating a cavity in a substrate of a magnetic
recording head - Google Patents US8343363B1 - Method and system for fabricating a cavity in …

This research paper develops an effective methodology to determine the optimum etching
conditions for slider fabrication that meet hard disk drive (HDD) industrial targets using a …

As a commercial photolithography dry film is not possible to achieve a very deep (greater
than 30μm) step etch, to fabricate Burnish head and Glide head in slider fabrication section …

In this work, CF polymer rich re-deposition are generated on the etched side wall of the
patterned Air Bearing Surface (ABS). This CF rich polymer is a by product from using a …

The transfer characteristics of the three-dimensional (3D) photoresist (PR) pattern to the
aluminum titanium carbide (AlTiC) layer made for an air bearing surface (ABS) using the …

This paper reports the analysis of the composition, structure and phase of the re-deposition
material that was generated from the reaction from CF4 plasma etching on the Al2O3-TiC …

A new tape-head design with surface cavities is presented as an alternative to the
conventional skiving-edge flat-profile head design. The new head design is referred to as …