Interferometric lithography (IL) is a powerful technique for the definition of large‐area,
nanometer‐scale, periodically patterned structures. Patterns are recorded in a light …

Research in recent years has greatly advanced the understanding and capabilities of multi-
beam interference (MBI). With this technology it is now possible to generate a wide range of …

Pairs of metal nanoparticles with a sub-10 nm gap are an efficient way to achieve extreme
near-field enhancement for sensing applications. We demonstrate an attractive alternative …

This paper presents a new method for the generation of cross-scale laser interference
patterns and the fabrication of moth-eye structures on silicon. In the method, moth-eye …

Gratings produced by two-spherical-beam Laser Interference Lithography (LIL) will have a
nonuniform period, and the associated period variation is larger with the increase of the …

This paper presents a cost-effective interference lithography system that uses a 405 nm
AlInGaN semiconductor laser. This method is cost-effective because the AlInGaN …

The fast and precise fabrication of micro-devices based on single flakes of novel 2D
materials and stacked heterostructures is vital for exploration of novel functionalities. In this …

We present a comprehensive simulative and experimental investigation of how period-
chirped pulse compression gratings affect the compressed pulses. A specifically developed …

We present a novel, cost-effective laser lithography system capable of producing periodic
and non-periodic patterns with sub-micrometre feature sizes and periodicities. The optical …

This paper presents a cost-effective fabrication method of grating structures with a period of
sub-μm for surface encoders. By employing an inexpensive and compact blue laser diode …