Boron carbide films deposited by PECVD are subjected to post deposition vacuum
annealing and plasma treatment for investigation of changes in the structure, linear and non …

激光诱导损伤阈值是大功率光学系统中重要参数, 其数值大小对激光系统的输出功率与稳定性
具有重要影响. 为了突破损伤阈值对激光光学系统输出功率的限制, 科研人员主要从制备薄膜 …

Hafnium oxide is widely used as high refractive index material for making high power laser
coatings for UV spectral range. Thermal annealing is one of the most efficient post …

HfO 2 thin films were deposited by electron beam evaporation technique at different oxygen
(O 2) partial pressures. The films are characterized using x-ray diffraction, x-ray reflectivity …

HfO 2 monolayer coatings are grown by plasma-enhanced atomic layer deposition (PEALD),
and the effects of the thermal annealing atmosphere and temperature on the surface …

In this report, a sol–gel method has been developed using tantalum ethoxide to produce
homogenous thin films of amorphous Ta 2 O 5 for application in optical coating for high …

This research investigates the improvements of ozone (O3) annealing on the optical and
etching characteristics of TiO2/Al2O3 multilayer band-pass filters designed for potential …

Nanosecond laser irradiation damage of optical films is one of the main factors to limit the
output power when the high power solid laser system is used to drive inertial confinement …

Abstract HfO 2-Al 2 O 3 mixture coatings with different Al 2 O 3 doping contents are
deposited on fused silica substrate using an electron-beam co-evaporation process. The …

Tuning ion energies in plasma-enhanced atomic layer deposition (PEALD) processes
enables fine control over the material properties of functional coatings. The growth …