Part-Level Fault Classification of Mass Flow Controller Drift in Plasma Deposition Equipment
MH Kim, HE Sim, SJ Hong - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
Semiconductor manufacturing processing can be jeopardized due to process fluctuations,
and the degradation of equipment parts can significantly influence process variation. Timely …
and the degradation of equipment parts can significantly influence process variation. Timely …