Microelectromechanical systems (MEMS) represents a technology that integrates
miniaturized mechanical and electromechanical components (ie, sensors and actuators) that …

This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

Over the last few years, considerable effort has gone into the study of the failure
mechanisms and reliability of micro-electromechanical systems (MEMS). Although still very …

Reliability issues currently hamper the commercialization of capacitive RF MEMS switches.
The most important failure mode is parasitic charging of the dielectric of such devices. In this …

A linear-polarization (LP)/circular-polarization (CP) switchable reconfigurable antenna using
a radio frequency micro-electro-mechanical-system (RF-MEMS) switch is proposed and a …

This paper details single-crystalline silicon (SCS) direct contact radio frequency
microelectromechanical systems (RF MEMS) switch designed and fabricated using an SiOG …

In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …

A radio-frequency micro-electro-mechanical systems (RF MEMS) switch with bistable states
based on electromagnetic actuation is presented. The switch has two stable positions due to …

The development and application of magnetic technologies employing microfabricated
magnetic structures for the production of switching components has generated enormous …

In this paper, the design of a low-k meander based MEMS shunt capacitive switch with
perforated beam meander has been presented. A closed form analytical model to calculate …