GaAs on Si: Towards a low-temperature “smart-cut” technology

G Gawlik, J Jagielski, B Piątkowski - Vacuum, 2003 - Elsevier
The basis of a new technology allowing the bonding of GaAs layers on various substrates is
described. The method consists in the use of a two-step thermal profile during hydrogen …

Hydrogen ion implantation mechanism in GaAs‐on‐insulator wafer formation by ion‐cut process

HJ Woo, HW Choi, GD Kim, JK Kim, W Hong… - AIP Conference …, 2006 - pubs.aip.org
The results of the basic study on depth distribution of hydrogen atoms and corresponding
damage profiles produced by 40 keV hydrogen ion implantation in (100) GaAs are reported …

Annealing enhanced hydrogen absorption in nanocrystalline Pd∕ Au sensing films

Z Zhao, MA Carpenter - Journal of applied physics, 2005 - pubs.aip.org
The enhanced hydrogen absorption and sensitivity of nanocrystalline Pd (60 at.%)∕ Au (40
at.%) thin films were realized through the development of a thermal annealing process and a …

Influence of hydrogen treatment on electrical properties of detector-grade CdMnTe: In crystals

P Yu, T Shao, Z Ma, P Gao, B Jing, W Liu… - … on Nuclear Science, 2021 - ieeexplore.ieee.org
The effects of hydrogen treatment on electrical properties of detector-grade cadmium
manganese telluride (CdMnTe: In) crystals were investigated. The results showed that the …

Study of optical properties of high-resistivity CdMnTe: In single crystals before and after H2 atmosphere annealing

P Yu, Y Chen, J Song, Y Zhu, M Zhang, B Zhang… - Materials Science and …, 2019 - Elsevier
In order to investigate the passivation effects of hydrogen, high-resistivity indium doped
cadmium manganese telluride (CMT: In) single crystals were annealed in H 2 atmosphere …

The structural evolution of light-ion implanted into GaAs single crystal after annealing

R Huang, T Lan, C Li, J Li, Z Wang - Nuclear Instruments and Methods in …, 2021 - Elsevier
Four groups of He+ and H+ with different dose combinations are implanted into GaAs
crystal. After annealing, different phenomena of blisters and exfoliation appear on the …

Estimation of radiological properties of common ion implantation materials for different heavy ions

M Büyükyıldız - Radiation Effects and Defects in Solids, 2017 - Taylor & Francis
In the present work, the effective atomic number () and electron density () of some common
ion implantation materials namely GaAs, Si3N4, SiO2 and Glass systems (Boro-Silicate, Pb …

Blister formation in ion-implanted GaAs: Role of diffusivity

RR Collino, BB Dick, F Naab, YQ Wang… - Applied Physics …, 2009 - pubs.aip.org
We have investigated the influence of substrate temperature during implantation, T
implant⁠, on blister formation in GaAs: N layers produced by N ion implantation followed by …

[HTML][HTML] 多晶矽阻擋層阻擋離子佈植雜質之研究

范哲銘 - 2013 - ir.lib.ncu.edu.tw
摘要(中) 在半導體產業中, SOI 的發展解決了傳統矽材的問題, 提昇了固態元件的效率和降低
能量損耗, 而通常是利用智切法來製作SOI 材料. 在智切法的步驟中, 我們將離子佈植的步驟 …

Compound Semiconductor Heterostructures by Smart Cut™: SiC On Insulator, QUASIC™ Substrates, InP and GaAs Heterostructures on Silicon

L Di Cioccio, E Jalaguier, F Letertre - Wafer Bonding: Applications and …, 2004 - Springer
Large band gap semiconductors will find more and more applications in such important
fields as power electronics, high temperature electronics or optoelectronics where traditional …