Information and communication technologies are permeating all aspects of industrial and
manufacturing systems, expediting the generation of large volumes of industrial data. This …

Abstract Advanced Process Control (APC) has become an increasingly pressing issue for
the semiconductor industry, particularly in the new era of sub-5nm process technology. To …

Fault detection and classification (FDC) is important for semiconductor manufacturing to
monitor equipment's condition and examine the potential cause of the fault. Each equipment …

Forecasting short-term cycle time (CT) of wafer lots is crucial for production planning and
control in the wafer manufacturing. A novel recurrent neural network called “bilateral long …

State estimators, including observers and Bayesian filters, are a class of model-based
algorithms for estimating variables in a dynamical system given the sensor measurements of …

Abstract Run-to-run (R2R) control is widely used in semiconductor manufacturing systems to
minimize the process drift, shift and variability. The R2R controller adjusts control actions or …

Wafer acceptance test (WAT) is a key process of semiconductor manufacturing. The
collected testing parameters can be used in identification of wafer defects, improvement of …

This paper studies the scheduling of jobs of different families on parallel machines, where
not all machines are qualified (eligible) to process all job families. Originating from …

Dramatic advancements and adoption of computing capabilities, communication
technologies, and advanced, pervasive sensing have impacted every aspect of modern …

Exponentially weighted moving average (EWMA) controllers have been extensively studied
for run-to-run (RtR) control in semiconductor manufacturing processes. However, the EWMA …