Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …

Piezoelectric vibration energy harvesting technologies have attracted a lot of attention in
recent decades, and the harvesters have been applied successfully in various fields, such …

Compact wireless light sources are a fundamental building block for applications ranging
from wireless displays to optical implants. However, their realization remains challenging …

This article reports lattice deformation and phase transition of AlScN thin films in the whole
composition. AlScN films were deposited on Pt/Ta/SiO 2/Si substrates by direct current …

In this work, we present a method for growing highly c-axis oriented aluminum scandium
nitride (AlScN) thin films on (100) silicon (Si), silicon dioxide (SiO2) and epitaxial polysilicon …

Ferroelectrics are multifunctional materials that have been widely used for various
applications by virtue of their various characteristics such as piezoelectricity and …

In this theoretical study, we explore the enhancement of sensing capabilities in surface
acoustic wave (SAW)-based magnetic field sensors through the integration of engineered …

The intricate interdependency of device design and fabrication process complicates the
development of microelectromechanical systems (MEMS). Commercial pressure has …

This paper reports on the deposition and characterization of piezoelectric AlXSc1-XN
(further: AlScN) films on Si substrates using AlSc alloy targets with 30 at.% Sc. Films were …

A zero-power wakeup scheme for energy-efficient sensor applications is presented in this
study based on a piezoelectric MEMS energy harvester featuring wafer-level-integrated …