Microelectromechanical systems (MEMS) represents a technology that integrates
miniaturized mechanical and electromechanical components (ie, sensors and actuators) that …

This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

In this study atomic force microscopy (AFM) creep indentations were performed to extract
viscoelastic properties of the different domains (defined as microrheology) observed in …

Mechanical devices are being introduced whose size scale is well below that of
conventional mechanical test specimens. The smallest devices have sizes in the nanometer …

This current review describes the various micro fabrication techniques, the reliability view of
various processes and the various problems that are caused during these processes. This …

In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …

This paper reviews various approaches to package MEMS, illustrated mainly with examples
from imec. Wafer-level or 0-level packaging is mostly dealt with. The role the package plays …

Electrothermal actuation is one of the main actuation mechanisms and has been employed
to make scanning microelectromechanical systems (MEMS) mirrors with large scan range …

RF MEMS are capacitive switches consisting of a suspended aluminum beam that can be
pulled down by electrostatic force. At elevated temperatures and high mechanical stresses …

In this paper, the reliability of gold components for microelectromechanical systems
applications is studied by evaluating the mechanical fatigue behavior. The lifetime of …