This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …

Precise measurement of variations in the local gravitational acceleration is valuable for
natural hazard forecasting, prospecting, and geophysical studies. Common issues of the …

High-precision microelectromechanical inertial sensors based on spring-mass structures are
of great interests for a wide range of applications, including inertial navigation, disaster …

The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of
accelerometer that combines the merits of optical measurement and Micro-Electro …

This paper discusses the design and fabrication of MEMS differential capacitive
accelerometer (z-axis sensitive) structure. The accelerometer structure consists of one each …

The reduction of temperature effect is vitally important for high precision sensors. This paper
introduces the theoretical analysis and experimental verification of an in-situ compensation …

Abstract Internet‐of‐Things and Cyber‐Physical‐System applications demand compact
power converters, which require inductors to have small footprints but considerable power …

The reduction of temperature effect is crucial for high-precision MEMS accelerometers. This
study presents an automatic real-time compensation method for reducing the temperature …

Capacitive MEMS accelerometers with area-variable periodic-electrode displacement
transducers found wide applications in disaster monitoring, resource exploration and inertial …

In this paper, stability and mechanistic simulations for a four-beam-mass-based MEMS
gravimeter were conducted, and guidelines for the gravimeter design were proposed. Based …