G Bruno, P Capezzuto, G Cicala… - IEEE transactions on …, 1990 - ieeexplore.ieee.org
Amorphous silicon-germanium alloys (a-Si/sub 1-x/Ge/sub x/: H, F) have been deposited by
glow-discharge decomposition of silicon tetrafluoride (SiF/sub 4/) and germane (GeH/sub 4/) …