Micromachined resonators: A review
This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …
decades in design, modeling, and fabrication of micromachined resonators. Although micro …
Noncontact human–machine interface using complementary information fusion based on mems and triboelectric sensors
Current noncontact human–machine interfaces (HMIs) either suffer from high power
consumption, complex signal processing circuits, and algorithms, or cannot support …
consumption, complex signal processing circuits, and algorithms, or cannot support …
Anchor losses in AlN contour mode resonators
J Segovia-Fernandez, M Cremonesi… - Journal of …, 2014 - ieeexplore.ieee.org
In this paper, we analyze possible sources of dissipation in aluminium nitride (AlN) contour
mode resonators for three different resonance frequency devices (fr)(220 MHz, 370 MHz …
mode resonators for three different resonance frequency devices (fr)(220 MHz, 370 MHz …
Flexible multifunctional platform based on piezoelectric acoustics for human–machine interaction and environmental perception
Flexible human–machine interfaces show broad prospects for next-generation flexible or
wearable electronics compared with their currently available bulky and rigid counterparts …
wearable electronics compared with their currently available bulky and rigid counterparts …
Temperature-compensated aluminum nitride Lamb wave resonators
In this paper, the temperature compensation of AlN Lamb wave resonators using edge-type
reflectors is theoretically studied and experimentally demonstrated. By adding a …
reflectors is theoretically studied and experimentally demonstrated. By adding a …
Micromachined one-port aluminum nitride Lamb wave resonators utilizing the lowest-order symmetric mode
The characteristics of one-port aluminum nitride (AlN) Lamb wave resonators utilizing the
lowest-order symmetric mode with electrically open, grounded, and floating bottom electrode …
lowest-order symmetric mode with electrically open, grounded, and floating bottom electrode …
The multi-mode resonance in AlN Lamb wave resonators
The characteristics of the multi-mode resonance behavior of AlN Lamb wave resonators
(LWRs) are theoretically and experimentally investigated for the first time in this paper …
(LWRs) are theoretically and experimentally investigated for the first time in this paper …
1.05-GHz CMOS oscillator based on lateral-field-excited piezoelectric AlN contour-mode MEMS resonators
C Zuo, J Van der Spiegel… - IEEE transactions on …, 2009 - ieeexplore.ieee.org
This paper reports on the first demonstration of a 1.05-GHz microelectromechanical (MEMS)
oscillator based on lateral-field-excited (LFE) piezoelectric AlN contourmode resonators …
oscillator based on lateral-field-excited (LFE) piezoelectric AlN contourmode resonators …
Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression
C Zuo, C Yun, CS Lo, J Kim - US Patent 8,816,567, 2014 - Google Patents
CPC....... 2Hell,". 55. 9, Hell" ing a piezoelectric material is disposed between the first con
99.9): O1): E; 9/1 73 26. O1 ductive layer and the second conductive layer. One or more …
99.9): O1): E; 9/1 73 26. O1 ductive layer and the second conductive layer. One or more …
Deep learning for non-parameterized MEMS structural design
The geometric designs of MEMS devices can profoundly impact their physical properties
and eventual performances. However, it is challenging for researchers to rationally consider …
and eventual performances. However, it is challenging for researchers to rationally consider …