[PDF][PDF] Comparative study on various microbolometer structures
J Nazdrowicz, M Szermer, C Maj… - International Journal …, 2016 - yadda.icm.edu.pl
Meaningful progress in the fields of MEMS is associated with the continuous development of
the micromachining technologies. One of the most promising devices in MEMS is thermal …
the micromachining technologies. One of the most promising devices in MEMS is thermal …
Temperature coefficient of resistance related to amorphous silicon/metal contact design of microbolometers
JH Su, WK Yeh, WT Chang, BL Wu… - … on Devices, Circuits …, 2016 - ieeexplore.ieee.org
This paper reports stacked nitride/amorphous silicon (a-Si)/titanium films as the absorber
and polyimide as the sacrificial layer of microbolometers. The films have low stress without …
and polyimide as the sacrificial layer of microbolometers. The films have low stress without …
Design of microbolometer by polycrystalline silicon in standard CMOS technology
Polycrystalline silicon films are widely used as sensor material in CMOS detectors. In this
paper, we designed an air-bridge microbolometer in standard CMOS technology with …
paper, we designed an air-bridge microbolometer in standard CMOS technology with …
Low-cost microbolometer infrared detectors utilizing cmos resistive layers
H Öztürk - 2017 - search.proquest.com
This thesis presents the efforts to develop low-cost microbolometer type uncooled infrared
detector architectures that utilize standard CMOS layers and components. Various …
detector architectures that utilize standard CMOS layers and components. Various …