Ferroelectricity and Oxide Reliability of Stacked Hafnium–Zirconium Oxide Devices
RY Liao, HH Chen, PY Lin, TA Liang, KH Su, IC Lin… - Materials, 2023 - mdpi.com
In this work, we investigate the ferroelectricity of stacked zirconium oxide and hafnium oxide
(stacked HfZrO) with different thickness ratios under metal gate stress and simultaneously …
(stacked HfZrO) with different thickness ratios under metal gate stress and simultaneously …